Imaging with a rectangular phase grating applied to displacement metrology
Applied Optics, Vol. 45, Issue 8, pp. 1713-1720 (2006)
http://dx.doi.org/10.1364/AO.45.001713
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Abstract
We achieved displacement metrology with a high-amplitude signal by using a rectangular phase grating as the pupil in a grating imaging system. The imaging phenomenon with a pupil transmission grating that has a bilevel profile with a
© 2006 Optical Society of America
OCIS Codes
(110.4850) Imaging systems : Optical transfer functions
(120.3940) Instrumentation, measurement, and metrology : Metrology
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: March 24, 2005
Revised Manuscript: September 8, 2005
Manuscript Accepted: September 11, 2005
Citation
Yoichi Ohmura, Toru Oka, Toshiro Nakashima, and Kazuhiro Hane, "Imaging with a rectangular phase grating applied to displacement metrology," Appl. Opt. 45, 1713-1720 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-8-1713
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