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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 8 — Mar. 10, 2006
  • pp: 1713–1720

Imaging with a rectangular phase grating applied to displacement metrology

Yoichi Ohmura, Toru Oka, Toshiro Nakashima, and Kazuhiro Hane  »View Author Affiliations

Applied Optics, Vol. 45, Issue 8, pp. 1713-1720 (2006)

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We achieved displacement metrology with a high-amplitude signal by using a rectangular phase grating as the pupil in a grating imaging system. The imaging phenomenon with a pupil transmission grating that has a bilevel profile with a 50 % duty ratio is discussed on the basis of the optical transfer function. By optimizing the imaging condition, we obtained high-contrast images with high light power under a magnified or demagnified imaging system. The amplitude of the signal in the displacement measurement was four times higher than that of the conventional grating imaging system with amplitude gratings.

© 2006 Optical Society of America

OCIS Codes
(110.4850) Imaging systems : Optical transfer functions
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: March 24, 2005
Revised Manuscript: September 8, 2005
Manuscript Accepted: September 11, 2005

Yoichi Ohmura, Toru Oka, Toshiro Nakashima, and Kazuhiro Hane, "Imaging with a rectangular phase grating applied to displacement metrology," Appl. Opt. 45, 1713-1720 (2006)

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