Microelectromechanical system pressure sensor integrated onto optical fiber by anodic bonding
Applied Optics, Vol. 45, Issue 8, pp. 1737-1742 (2006)
http://dx.doi.org/10.1364/AO.45.001737
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Abstract
Optical microelectromechanical system pressure sensors based on the principle of Fabry–Perot interferometry have been developed and fabricated using the technique of silicon-to-silicon anodic bonding. The pressure sensor is then integrated onto an optical fiber by a novel technique of anodic bonding without use of any adhesives. In this anodic bonding technique we use ultrathin silicon of thickness
© 2006 Optical Society of America
OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(230.3990) Optical devices : Micro-optical devices
(230.4000) Optical devices : Microstructure fabrication
ToC Category:
Optical Devices
History
Original Manuscript: February 11, 2005
Revised Manuscript: September 22, 2005
Manuscript Accepted: September 28, 2005
Virtual Issues
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics
Citation
Anish Saran, Don C. Abeysinghe, and Joseph T. Boyd, "Microelectromechanical system pressure sensor integrated onto optical fiber by anodic bonding," Appl. Opt. 45, 1737-1742 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-8-1737
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