OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 8 — Mar. 10, 2006
  • pp: 1737–1742

Microelectromechanical system pressure sensor integrated onto optical fiber by anodic bonding

Anish Saran, Don C. Abeysinghe, and Joseph T. Boyd  »View Author Affiliations


Applied Optics, Vol. 45, Issue 8, pp. 1737-1742 (2006)
http://dx.doi.org/10.1364/AO.45.001737


View Full Text Article

Enhanced HTML    Acrobat PDF (703 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Optical microelectromechanical system pressure sensors based on the principle of Fabry–Perot interferometry have been developed and fabricated using the technique of silicon-to-silicon anodic bonding. The pressure sensor is then integrated onto an optical fiber by a novel technique of anodic bonding without use of any adhesives. In this anodic bonding technique we use ultrathin silicon of thickness 10   μm to bond the optical fiber to the sensor head. The ultrathin silicon plays the role of a stress-reducing layer, which helps the bonding of an optical fiber to silicon having conventional wafer thickness. The pressure-sensing membrane is formed by 8   μm thick ultrathin silicon acting as a membrane, thus eliminating the need for bulk silicon etching. The pressure sensor integrated onto an optical fiber is tested for static response, and experimental results indicate degradation in the fringe visibility of the Fabry–Perot interferometer. This effect was mainly due to divergent light rays from the fiber degrading the fringe visibility. This effect is demonstrated in brief by an analytical model.

© 2006 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(230.3990) Optical devices : Micro-optical devices
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Optical Devices

History
Original Manuscript: February 11, 2005
Revised Manuscript: September 22, 2005
Manuscript Accepted: September 28, 2005

Virtual Issues
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics

Citation
Anish Saran, Don C. Abeysinghe, and Joseph T. Boyd, "Microelectromechanical system pressure sensor integrated onto optical fiber by anodic bonding," Appl. Opt. 45, 1737-1742 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-8-1737


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. M. F. Miller, M. G. Allen, E. Arkilic, K. S. Breuer, and M. A. Schmidt, "Fabry-Perot pressure sensor arrays for imaging surface pressure distributions," in Proceedings of International Conference on Solid-State Sensors and Actuators (Kluwer, 1997), pp. 1469-1472. [CrossRef]
  2. J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001). [CrossRef]
  3. W. Li, D. C. Abeysinghe, and J. T. Boyd, "Multiplexed sensor system for simultaneous measurement of pressure and temperature," Opt. Eng. 43, 148-156 (2004). [CrossRef]
  4. Z. Xiao, U. O. Engström, and N. Vidovic, "Diaphragm deflection of silicon interferometer structures used as pressure sensors," Sens. Actuators A 58, 99-107 (1997). [CrossRef]
  5. G. Beheim, "Fiber-optic temperature sensor using a thin film Fabry-Perot interferometer," NASA Tech. Memo. TM-107459 (Lewis Research Center, 1997).
  6. Y. Huang, S. Ergun, E. Haeggström, M. H. Badi, and B. T. Khuri-Yakub, "Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology," J. Microelctromech. Syst. 12, 128-137 (2003). [CrossRef]
  7. D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng. 12, 229-135 (2002). [CrossRef]
  8. A. Saran, D. C. Abeysinghe, R. Flenniken, and J. T. Boyd, "Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers," J. Micromech. Microeng. 13, 346-351 (2003). [CrossRef]
  9. A. Yariv, Quantum Electronics, 4th ed. (Wiley, 1998).
  10. A. Richard, "Anodic bonding for microsystem applications," Licentiate thesis (Uppsala University, 2000).
  11. G. Beheim, K. Fritsch, and R. N. Poorman, "Fiber-linked interferometric pressure sensor," Rev. Sci. Instrum. 58, 1655-1659 (1987). [CrossRef]
  12. A. Saran, "Development of MEMS based Fabry-Perot pressure sensor and non-adhesive integration on optical fiber by anodic bonding," Ph.D. dissertation (University of Cincinnati, 2004).
  13. D. C. Abeysinghe, V. Ranatunga, A. Balagopal, H. Mu, and D. Klotzkin, "A novel technique for high-strength direct fiber-to-Si submount attachment using field-assisted anodic bonding for optoelectronics packaging," IEEE Photon. Technol. Lett. 16, 2150-2152 (2004). [CrossRef]
  14. D. C. Abeysinghe, V. Ranatunga, A. Balagopal, H. Mu, A. Saran, J. T. Boyd, and D. Klotzkin, "Wired fiber: field assisted bonding of fiber to silicon submounts for optoelectronics for epoxy-free passive alignment and low-cost packaging," invited talk at the Great Lakes Photonics Symposium, Cleveland, Ohio 7-11 June 2004.
  15. F. Perennes, P. C. Beard, and T. N. Mills, "Analysis of a low-finesse Fabry-Perot sensing interferometer illuminated by a multimode optical fiber," Appl. Opt. 38, 7026-7034 (1999). [CrossRef]
  16. R. A. Wolthius, G. L. Mitchell, E. Saaski, J. C. Hartl, and M. A. Afromowitz, "Development of medical pressure and temperature sensors employing optical spectrum modulation," IEEE Trans. Biomed. Eng. 38, 974-981 (1991). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited