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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 8 — Mar. 10, 2006
  • pp: 1765–1772

SiC∕Tb and Si∕Tb multilayer coatings for extreme ultraviolet solar imaging

Benjawan Kjornrattanawanich, David L. Windt, John F. Seely, and Yurii A. Uspenskii  »View Author Affiliations

Applied Optics, Vol. 45, Issue 8, pp. 1765-1772 (2006)

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Narrowband SiC∕Tb and Si∕Tb multilayers are fabricated with as much as a 23 % normal-incidence reflectance near a 60   nm wavelength and spectral bandpass (FWHM) values of 9.4 and 6.5   nm , respectively. The structural properties of the films are investigated using extreme ultraviolet and x-ray reflectometry and transmission electron microscopy. Thermal stability is investigated in films annealed to as high as 300 ° C . Because of their superior thermal stability, relatively high reflectance, and narrower spectral bandpass, Si∕Tb multilayers are identified as optimal candidates for solar physics imaging applications, where the peak response can be tuned to important emission lines such as O v near 63.0   nm and Mg x near 61.0   nm . We describe our experimental procedures and results, discuss the implications of our findings, and outline prospects for improved performance.

© 2006 Optical Society of America

OCIS Codes
(230.4170) Optical devices : Multilayers
(310.1620) Thin films : Interference coatings
(310.6860) Thin films : Thin films, optical properties
(340.0340) X-ray optics : X-ray optics
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Thin Films

Original Manuscript: July 29, 2005
Revised Manuscript: September 29, 2005
Manuscript Accepted: October 5, 2005

Virtual Issues
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics

Benjawan Kjornrattanawanich, David L. Windt, John F. Seely, and Yurii A. Uspenskii, "SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging," Appl. Opt. 45, 1765-1772 (2006)

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