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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 8 — Mar. 10, 2006
  • pp: 1765–1772

SiC∕Tb and Si∕Tb multilayer coatings for extreme ultraviolet solar imaging

Benjawan Kjornrattanawanich, David L. Windt, John F. Seely, and Yurii A. Uspenskii  »View Author Affiliations


Applied Optics, Vol. 45, Issue 8, pp. 1765-1772 (2006)
http://dx.doi.org/10.1364/AO.45.001765


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Abstract

Narrowband SiC∕Tb and Si∕Tb multilayers are fabricated with as much as a 23 % normal-incidence reflectance near a 60   nm wavelength and spectral bandpass (FWHM) values of 9.4 and 6.5   nm , respectively. The structural properties of the films are investigated using extreme ultraviolet and x-ray reflectometry and transmission electron microscopy. Thermal stability is investigated in films annealed to as high as 300 ° C . Because of their superior thermal stability, relatively high reflectance, and narrower spectral bandpass, Si∕Tb multilayers are identified as optimal candidates for solar physics imaging applications, where the peak response can be tuned to important emission lines such as O v near 63.0   nm and Mg x near 61.0   nm . We describe our experimental procedures and results, discuss the implications of our findings, and outline prospects for improved performance.

© 2006 Optical Society of America

OCIS Codes
(230.4170) Optical devices : Multilayers
(310.1620) Thin films : Interference coatings
(310.6860) Thin films : Thin films, optical properties
(340.0340) X-ray optics : X-ray optics
(350.1260) Other areas of optics : Astronomical optics

ToC Category:
Thin Films

History
Original Manuscript: July 29, 2005
Revised Manuscript: September 29, 2005
Manuscript Accepted: October 5, 2005

Virtual Issues
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics

Citation
Benjawan Kjornrattanawanich, David L. Windt, John F. Seely, and Yurii A. Uspenskii, "SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging," Appl. Opt. 45, 1765-1772 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-8-1765


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References

  1. J. P. Delaboudinière, G. E. Artzner, J. Brunaud, A. H. Gabriel, J. F. Hochdez, F. Millier, X. Y. Song, B. Au, K. P. Dere, R. A. Howard, R. Kreplin, D. J. Michels, J. D. Moses, J. M. Defise, C. Jamar, P. Rochus, J. P. Chauvineau, J. P. Marioge, R. C. Catura, J. R. Lemen, L. Shing, R. A. Stern, J. B. Gurman, W. M. Neupert, A. Maucherat, F. Clette, P. Cugnon, and E. L. Van Dessel, "EIT: extreme-ultraviolet imaging telescope for the SOHO mission," Sol. Phys. 162, 291-312 (1995). [CrossRef]
  2. B. N. Handy, L. W. Acton, C. C. Kankelborg, C. J. Wolfson, D. J. Akin, M. E. Bruner, R. Caravalho, R. C. Catura, R. Chevalier, D. W. Duncan, C. G. Edwards, C. N. Feinstein, S. L. Freeland, F. M. Friedlander, C. H. Hoffmann, N. E. Hurlburt, B. K. Jurcevich, N. L. Katz, G. A. Kelly, J. R. Lemen, M. Levay, R. W. Lindgren, D. P. Mathur, S. B. Meyer, S. J. Morrison, M. D. Morrison, R. W. Nightingale, T. P. Pope, R. A. Rehse, C. J. Schrijver, R. A. Shine, L. Shing, T. D. Tarbell, A. M. Title, D. D. Torgerson, L. Golub, J. A. Bookbinder, D. Caldwell, P. N. Cheimets, W. N. Davis, E. E. DeLuca, R. A. McMullen, D. Amato, R. Fisher, H. Maldonado, and C. Parkinson, "The transition region and coronal explorer," Sol. Phys. 187, 229-260 (1999). [CrossRef]
  3. R. A. Howard, J. D. Moses, and D. G. Socker, "Sun Earth Connection Coronal and Heliospheric Investigation (SECCHI)," in Instrumentation for UV/EUV Astronomy and Solar Missions, S. Fineschi, C. M. Korendyke, O. H. Siegmund, and B. E. Woodgate, eds., Proc. SPIE 4139, 259-283 (2000). [CrossRef]
  4. R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, "Development and testing of EUV multilayer coatings for the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory," in Solar Physics andSpace Weather Instrumentation, S. Fineschi and R. Viereck, eds., Proc. SPIE 5901, 173-183 (2005).
  5. D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, "Experimental comparison of extreme-ultraviolet multilayers for solar physics," Appl. Opt. 43, 1835-1848 (2004). [CrossRef]
  6. U. Feldman, J. D. Purcell, and B. Dohne, An Atlas of Extreme Ultraviolet Spectroheliograms from 170 to 625 Angstroms (Naval Research Laboratory Publication, 1987).
  7. U. Feldman, I. E. Dammasch, K. Wilhelm, P. Lemaire, and D. M. Hassler, Images of the Solar Upper Atmosphere from SUMER on SOHO (European Space Agency Publications Division, 2003).
  8. Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A. I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, and V. Yu. Fedotov, "High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35-50 nm," Opt. Lett. 23, 771-773 (1998).
  9. J. F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V. V. Kondratenko, and A. V. Vinogradov, "Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38 nm wavelength," Appl. Opt. 41, 1846-1851 (2002).
  10. Yu. A. Uspenskii, J. F. Seely, N. L. Popov, A. V. Vinogradov, Yu. P. Pershin, and V. V. Kondratenko, "Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium," J. Opt. Soc. Am. 21, 298-305 (2004). [CrossRef]
  11. J. Seely, L. Goray, D. Windt, B. Kjornrattanawanich, Y. Uspenskii, and A. Vinogradov, "Extreme ultraviolet optical constants for the design and fabrication of multilayer-coated gratings," in Optical Constants of Materials for UV to X-Ray Wavelengths, R. Soufli and J. F. Seely, eds., Proc. SPIE 5538, 43-52 (2004). [CrossRef]
  12. Y. Uspenski, J. Seely, N. Popov, I. Artioukov, A. Vinogradov, D. Windt, and B. Kjornrattanawanich, "Extreme UV optical constants of rare-earth metals free from effects of air contamination," in Soft X-Ray Lasers and Application VI, E. E. Fill and S. Suckewer, eds., Proc. SPIE 5919, 213-220 (2005).
  13. J. Dalla Torre, G. H. Gilmer, D. L. Windt, R. Kalyanaraman, F. H. Bauman, P. L. O'Sullivan, J. Sapjeta, T. Diaz de la Rubia, and M. Djafari Rouhani, "Microstructure of thin tantalum films sputtered onto inclined substrates: experiments and atomistic simulations," J. Appl. Phys. 94, 263-271 (2003). [CrossRef]
  14. D. L. Windt, "IMD software for modeling the optical properties of multilayer films," Comput. Phys. 12, 360-370 (1998). [CrossRef]
  15. B. L. Henke, E. M. Gullikson, and J. C. Davis, "X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92," At. Data Nucl. Data Tables 54, 181-342 (1993). [CrossRef]
  16. J. C. Rife, H. R. Sadeghi, and W. R. Hunter, "Upgrades and recent performance of the grating/crystal monochromator," Rev. Sci. Instrum. 60, 2064-2067 (1989). [CrossRef]
  17. J. Seely and B. Kjornrattanawanich, "Measurement of extreme-ultraviolet attenuation edges of magnesium, tin, and indium filters," Appl. Opt. 42, 6374-6381 (2003).
  18. D. F. Edwards, "Silicon (Si)," in Handbook of Optical Constants of Solids, E.D.Palik, eds. (Academic, 1985), p. 547.
  19. H. P. Philipp, "Silicon dioxide (SiO2) (glass)," in Handbook of Optical Constants of Solids, E.D.Palik, eds. (Academic, 1985), p. 749.
  20. J. B. Kortright and D. L. Windt, "Amorphous silicon carbide coatings for extreme ultraviolet optics," Appl. Opt. 27, 2841-2846 (1988).
  21. S. Bajt, D. G. Stearns, and P. A. Kearney, "Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers," J. Appl. Phys. 90, 1017-1025 (2001). [CrossRef]
  22. S. V. Meschel and O. J. Chicago, "Standard enthalpies of formation of some carbides, silicides, germanides, stannides, and borides of terbium determined by high temperature direct synthesis calorimetry," J. Alloys Compd. 234, 137-142 (1996). [CrossRef]
  23. A. V. Vinogradov, Y. P. Pershin, E. N. Zubarev, D. L. Voronov, A. V. Penkov, V. V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, and J. F. Seely, "Structure, thermal stability and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors," in Soft X-Ray Lasers and Applications IV, E. E. Fill and J. J. Rocca, eds., Proc. SPIE 4505, 230-235 (2001). [CrossRef]
  24. B. Kjornrattanawanich, S. Bajt, and J. F. Seely, "Mo/B4C/Si multilayer-coated photodiode with polarization sensitivity at an extreme-ultraviolet wavelength of 13.5 nm," Appl. Opt. 43, 1082-1090 (2004). [CrossRef]

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