A Mo–Si multilayer mirror has been used for determination of the ellipticity and higher-order content of a synchrotron beam. The method is based on the angular measure of multilayer reflectivity in the region of Bragg first- and second-order reflections. Beam parameters were derived by a fitting procedure.
© 2006 Optical Society of America
Original Manuscript: May 16, 2005
Revised Manuscript: September 19, 2005
Manuscript Accepted: September 23, 2005
Maria-Guglielmina Pelizzo, F. Frassetto, P. Nicolosi, A. Giglia, N. Mahne, and S. Nannarone, "Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers," Appl. Opt. 45, 1985-1992 (2006)