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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 1 — Jan. 1, 2007
  • pp: 87–94

Real-time heterodyne imaging interferometry: focal-plane amplitude and phase demodulation using a three-phase correlation image sensor

Akira Kimachi  »View Author Affiliations


Applied Optics, Vol. 46, Issue 1, pp. 87-94 (2007)
http://dx.doi.org/10.1364/AO.46.000087


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Abstract

A method of real-time heterodyne imaging interferometry using a three-phase correlation image sensor (3PCIS) is proposed. It simultaneously demodulates the amplitude and phase images of an incident interference pattern at an ordinary frame rate with good accuracy, thus overcoming the trade-off among measurement time, spatial resolution, and demodulation accuracy suffered in conventional interferometry. An experimental system is constructed with a 64 × 64 3PCIS camera operated at 30   frames∕s and a two-frequency He–Ne laser with a beat frequency of 25   kHz . The results obtained for a scanning mirror and heated silicone oil confirm the proposed method.

© 2007 Optical Society of America

OCIS Codes
(040.1240) Detectors : Arrays
(040.2840) Detectors : Heterodyne
(100.2550) Image processing : Focal-plane-array image processors
(110.2970) Imaging systems : Image detection systems
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

ToC Category:
Interferometry

History
Original Manuscript: May 22, 2006
Revised Manuscript: August 28, 2006
Manuscript Accepted: September 8, 2006

Citation
Akira Kimachi, "Real-time heterodyne imaging interferometry: focal-plane amplitude and phase demodulation using a three-phase correlation image sensor," Appl. Opt. 46, 87-94 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-1-87


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References

  1. R. Dändliker, B. Ineichen, and F. M. Mottier, "High-resolution hologram interferometry by electronic phase measurement," Opt. Commun. 9, 412-416 (1973). [CrossRef]
  2. N. A. Massie, R. D. Nelson, and S. Holly, "High-performance real-time heterodyne interferometry," Appl. Opt. 18, 1797-1803 (1979). [CrossRef] [PubMed]
  3. K. J. Gåsvik, Optical Metrology, 3rd ed. (Wiley, 2002). [CrossRef]
  4. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, "Digital wavefront measuring interferometer for testing optical surfaces and lenses," Appl. Opt. 13, 2693-2703 (1974). [CrossRef] [PubMed]
  5. C. J. Morgan, "Least-squares estimation in phase-measurement interferometry," Opt. Lett. 7, 368-370 (1982). [CrossRef] [PubMed]
  6. M. Akiba, K. P. Chan, and N. Tanno, "Full-field optical coherence tomography by two-dimensional heterodyne detection with a pair of CCD cameras," Opt. Lett. 28, 816-818 (2003). [CrossRef] [PubMed]
  7. M. C. Pitter, C. W. See, and M. G. Somekh, "Full-field heterodyne interference microscope with spatially incoherent illumination," Opt. Lett. 29, 1200-1202 (2004). [CrossRef] [PubMed]
  8. R. Dändliker, Y. Salvadé, and E. Zimmermann, "Distance measurement by multiple-wavelength interferometry," J. Opt. 29, 105-114 (1998). [CrossRef]
  9. T. Spirig, P. Seitz, O. Vietze, and F. Heitger, "The lock-in CCD--two-dimensional synchronous detection of light," IEEE J. Quantum Electron. 31, 1705-1708 (1995). [CrossRef]
  10. H. Povel, H. Aebersold, and J. O. Stenflo, "Charge-coupled device image sensor as a demodulator in a 2-D polarimeter with a piezoelastic modulator," Appl. Opt. 29, 1186-1190 (1990). [CrossRef] [PubMed]
  11. S. Bourquin, P. Seitz, and R. P. Salathé, "Optical coherence topography based on a two-dimensional smart detector array," Opt. Lett. 26, 512-514 (2001). [CrossRef]
  12. S. Bourquin, P. Seitz, and R. P. Salathé, "Two-dimensional smart detector array for interferometric applications," Electron. Lett. 37, 975-976 (2001). [CrossRef]
  13. S. Ando, T. Nakamura, and T. Sakaguchi, "Ultrafast correlation image sensor: concept, design and applications," in Proceedings of IEEE Workshop on Charge-Coupled Devices and Advanced Image Sensors (1997).
  14. S. Ando and A. Kimachi, "Correlation image sensor: two-dimensional matched detection of amplitude-modulated light," IEEE Trans. Electron Devices 50, 2059-2066 (2003). [CrossRef]
  15. A. Kimachi and M. Ida, "Real-time heterodyne imaging interferometry using three-phase correlation image sensor," in Proceedings of Society of Instrument and Control Engineers (SICE) Annual Conference (2004), pp. 2488-2493.
  16. VLSI Design and Education Center, the University of Tokyo, Japan, http://www.vdec.u-tokyo.ac.jp/.
  17. A. Kimachi and S. Ando, "Measurement and compensation of average-irradiance dependence in frequency response of correlation image sensor," IEE J. Trans. Sensors Micromach . 126, 345-351 (2006). [CrossRef]

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