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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 11 — Apr. 10, 2007
  • pp: 2027–2035

Interferometric measurement of phase change on reflection

Kate M. Medicus, Marcus Chaney, John E. Brodziak, Jr., and Angela Davies  »View Author Affiliations

Applied Optics, Vol. 46, Issue 11, pp. 2027-2035 (2007)

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We show an interferometric method for measuring phase change with known uncertainty. Because this measurement uses the backreflection from a sample, the height is intrinsically removed, and only the phase change is measured. The uncertainty in the phase change measurement is ± 3.8 ° and is dominated by the background subtraction method. We also investigate the effect of the phase change on the interferometric radius measurement. The theoretical worst-case error in the interferometric radius measurement due to the phase change is 30   nm .

© 2007 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5700) Instrumentation, measurement, and metrology : Reflection

ToC Category:

Original Manuscript: August 30, 2006
Revised Manuscript: November 14, 2006
Manuscript Accepted: November 28, 2006
Published: March 20, 2007

Kate M. Medicus, Marcus Chaney, John E. Brodziak, Jr., and Angela Davies, "Interferometric measurement of phase change on reflection," Appl. Opt. 46, 2027-2035 (2007)

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  1. T. L. Schmitz, A. D. Davies, and C. J. Evans, "Uncertainties in interferometric measurements of radius of curvature," in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE 4451, 432-447 (2001).
  2. T. McWaid, T. Vorburger, J. F. Song, and D. Chandler-Horowitz, "The effects of thin films on interferometric step height measurements," in Interferometry: Surface Characterization and Testing, K. Creath and J. E. Greivenkamp, eds., Proc. SPIE 1776, 2-13 (1992).
  3. M. Park and S. Kim, "Compensation of phase change on reflection in white-light interferometry for step height measurement," Opt. Lett. 26, 420-422 (2001). [CrossRef]
  4. D. W. Lynch and W. R. Hunter, "Metals," in Handbook of Optical Constants of Solids, E. Palik, ed. (Academic, 1998), pp. 274-368.
  5. G. Hass and L. Hadley, "Optical properties of metals," in American Institute of Physics Handbook, 3rd ed., B. H. Billings and D. E. Gray, eds., (McGraw-Hill, 1982), pp. 6.118-6.160.
  6. J. H. Weaver and H. P. R. Frederikse, "Optical properties of selected elements," in CRC Handbook of Chemistry and Physics, 84th ed., D. R. Lide, ed. (CRC Press, 2003), pp. 12.116-12.140.
  7. T. Doi, K. Toyoda, and Y. Tanimura, "Effects of phase changes on reflection and their wavelength dependence in optical profilometry," Appl. Opt. 36, 7157-7161 (1997). [CrossRef]
  8. J. M. Bennett, "Precise method for measuring the absolute phase change on reflection," J. Opt. Soc. Am. 54, 612-624 (1964). [CrossRef]
  9. J. E. Breivenkamp and J. H. Bruning, "Phase shifting interferometry," in Optical Shop Testing, D. Malacara, ed. (Wiley, 1992), pp. 501-598.
  10. W. Lichten, "Precise wavelength measurements and optical phase shifts. I. General theory," J. Opt. Soc. Am. A 2, 1869-1876 (1985). [CrossRef]
  11. M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge U. Press, 1999).
  12. R. Liang, J. K. Erwin, and M. Mansuripur, "Measurement of the relative optical phase between amorphous and crystalline regions of the phase-change media of optical recording," Appl. Opt. 39, 2167-2173 (2000). [CrossRef]
  13. A. Harasaki, J. Schmit, and J. C. Wyant, "Offset of coherent envelope position due to phase change on reflection," Appl. Opt. 40, 2102-2106 (2001). [CrossRef]
  14. L. Ward, The Optical Constants of Bulk Materials and Films (Hilger, 1988).
  15. "Five Schott glass types," Melles Griot, 55 Science Parkway, Rochester, New York 14620, USA, http://www.mellesgriot.com/pdf/CatalogX/X_04_8-10.pdf (2006).
  16. Veeco Metrology Inc., Optical Profilers and Laser Interferometers, 2650 East Elvira Road Tucson, Ariz. 85706-7123, USA (personal communication, 2006).
  17. P. Bevington and D. K. Robinson, Data Reduction and Error Analysis for the Physical Sciences, 3rd ed. (McGraw-Hill, 2002).
  18. L. A. Selberg, "Radius measurement by interferometry," Opt. Eng. 31, 1961-1966 (1992). [CrossRef]
  19. C. J. Evans and R. N. Kestner, "Test optics error removal," Appl. Opt. 35, 1015-1021 (1996). [CrossRef] [PubMed]

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