Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Interferometric measurement of phase change on reflection

Not Accessible

Your library or personal account may give you access

Abstract

We show an interferometric method for measuring phase change with known uncertainty. Because this measurement uses the backreflection from a sample, the height is intrinsically removed, and only the phase change is measured. The uncertainty in the phase change measurement is ±3.8° and is dominated by the background subtraction method. We also investigate the effect of the phase change on the interferometric radius measurement. The theoretical worst-case error in the interferometric radius measurement due to the phase change is 30  nm.

© 2007 Optical Society of America

Full Article  |  PDF Article
More Like This
Precise interferometric length and phase-change measurement of gauge blocks based on reproducible wringing

Alexandre Titov, Igor Malinovsky, Hakima Belaïdi, Ricardo S. França, and Carlos A. Massone
Appl. Opt. 39(4) 526-538 (2000)

Effects of phase changes on reflection and their wavelength dependence in optical profilometry

Takuma Doi, Kouji Toyoda, and Yoshihisa Tanimura
Appl. Opt. 36(28) 7157-7161 (1997)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved