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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 12 — Apr. 20, 2007
  • pp: 2219–2228

Simplified optical scatterometry for periodic nanoarrays in the near-quasi-static limit

I. Abdulhalim  »View Author Affiliations


Applied Optics, Vol. 46, Issue 12, pp. 2219-2228 (2007)
http://dx.doi.org/10.1364/AO.46.002219


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Abstract

Scatterometry is now proven to be a very powerful technique for measurement of subwavelength periodic structures. However it requires heavy numerical calculations of the scattered optical waves from the structure. For periodic nanoarrays with feature size less than 100   nm , it is possible to simplify this using the Rytov near-quasi-static approximation valid for feature periods only few time less than the wavelength. The validity is investigated by way of comparison with exact numerical results obtained with the eigenfunctions approach. It is shown to be adequate for the determination of the structure parameters from the specularly reflected or transmitted waves and their polarization or ellipsometric properties. The validity of this approach is applied to lamellar nanoscale grating photoresist lines on Si substrate. The high sensitivity of the signals to the structure parameters is demonstrated using wavelengths of only few times the period.

© 2007 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: September 18, 2006
Revised Manuscript: December 1, 2006
Manuscript Accepted: December 4, 2006
Published: April 3, 2007

Citation
I. Abdulhalim, "Simplified optical scatterometry for periodic nanoarrays in the near-quasi-static limit," Appl. Opt. 46, 2219-2228 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-12-2219

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