Simplified optical scatterometry for periodic nanoarrays in the near-quasi-static limit
Applied Optics, Vol. 46, Issue 12, pp. 2219-2228 (2007)
http://dx.doi.org/10.1364/AO.46.002219
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Abstract
Scatterometry is now proven to be a very powerful technique for measurement of subwavelength periodic structures. However it requires heavy numerical calculations of the scattered optical waves from the structure. For periodic nanoarrays with feature size less than
© 2007 Optical Society of America
OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: September 18, 2006
Revised Manuscript: December 1, 2006
Manuscript Accepted: December 4, 2006
Published: April 3, 2007
Citation
I. Abdulhalim, "Simplified optical scatterometry for periodic nanoarrays in the near-quasi-static limit," Appl. Opt. 46, 2219-2228 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-12-2219
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