The high-spatial frequency roughness of a mirror operating at extreme ultraviolet (EUV) wavelengths is crucial for the reflective performance and is subject to very stringent specifications. To understand and predict mirror performance, precision metrology is required for measuring the surface roughness. Zerodur mirror substrates made by two different polishing vendors for a suite of EUV telescopes for solar physics were characterized by atomic force microscopy (AFM). The AFM measurements revealed features in the topography of each substrate that are associated with specific polishing techniques. Theoretical predictions of the mirror performance based on the AFM-measured high-spatial-frequency roughness are in good agreement with EUV reflectance measurements of the mirrors after multilayer coating.
© 2007 Optical Society of America
Instrumentation, Measurement, and Metrology
Original Manuscript: December 19, 2006
Manuscript Accepted: February 7, 2007
Published: May 15, 2007
Regina Soufli, Sherry L. Baker, David L. Windt, Eric M. Gullikson, Jeff C. Robinson, William A. Podgorski, and Leon Golub, "Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory," Appl. Opt. 46, 3156-3163 (2007)