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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 19 — Jul. 1, 2007
  • pp: 3987–3994

Differential sputter yield measurements using cavity ringdown spectroscopy

Vijay Surla and Azer P. Yalin  »View Author Affiliations


Applied Optics, Vol. 46, Issue 19, pp. 3987-3994 (2007)
http://dx.doi.org/10.1364/AO.46.003987


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Abstract

The first use of cavity ringdown spectroscopy (CRDS) to measure differential (angular) sputter yield profiles of sputtered particles is reported. Owing to the path-integrated nature of CRDS, inversion techniques are required. Our approach is to scan the optical axis relative to the source of sputtered particles and to measure the spatial profile of the CRDS signals. Modeling is then used to determine the differential sputter yield profile from the measured CRDS spatial profile. Demonstrative measurements are made with a Nd:YAG pumped optical parametric oscillator laser system for 750 eV argon ions normally incident on a molybdenum target. At these conditions we find an under- cosine sputtering distribution characterized by a = 0.22 ± 0.07 in good agreement with past quartz crystal microbalance measurements ( a = 0.19 ) .

© 2007 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6780) Instrumentation, measurement, and metrology : Temperature
(300.1030) Spectroscopy : Absorption

ToC Category:
Absorption and Cavity-Based Techniques

History
Original Manuscript: October 13, 2006
Revised Manuscript: January 20, 2007
Manuscript Accepted: February 12, 2007
Published: June 12, 2007

Citation
Vijay Surla and Azer P. Yalin, "Differential sputter yield measurements using cavity ringdown spectroscopy," Appl. Opt. 46, 3987-3994 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-19-3987


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References

  1. J. E. Polk, "An overview of the results from an 8200 hour wear test of the NSTAR ion thruster," in Proceedings of the AIAA/ASME/SAE/ASEE Joint Propulsion Conference (American Institute of Aeronautics and Astronautics, 1999).
  2. R. D. Kolasinski and J. E. Polk, AIAA Paper No. 2003-5144, in Proceedings of the 39th AIAA Joint Propulsion Conference (American Institute of Aeronautics and Astronautics, 2003).
  3. A. P. Yalin, J. D. Williams, V. Surla, J. Wolf, and K. A. Zoerb, "Azimuthal differential sputter yields of molybdenum by low energy Xe+ bombardment," in Proceedings of 42nd AIAA Joint Propulsion Conference (American Institute of Aeronautics and Astronautics, 2006).
  4. E. Oyarzabal, J. H. Yu, J. Hanna, G. R. Tynan, R. P. Doerner, K. J. Taylor, and K. Schmid, "Molybdenum and carbon cluster angular sputtering distributions under low energy xenon ion bombardment," in Proceedings of the 41st AIAA Joint Propulsion Conference (American Institute of Aeronautics and Astronautics, 2006).
  5. V. Shutthanandan, P. K. Ray, N. R. Shivaparan, R. J. Smith, and M. Mantenieks, "On the measurement of low-energy sputtering yield using Rutherford backscattering spectrometry," presented at The 21th International Electric Propulsion Conference (I.E.P.C., 1997).
  6. V. Surla, P. J. Wilbur, M. Johnson, J. D. Williams, and A. P. Yalin, "Sputter erosion measurements of titanium and molybdenum by cavity ringdown spectroscopy," Rev. Sci. Instrum. 75, 3025-3030 (2004). [CrossRef]
  7. A. P. Yalin, V. Surla, M. Butweiller, and J. D. Williams, "Detection of sputtered metals using cavity ringdown spectroscopy," Appl. Opt. 44, 6496-6505 (2005). [CrossRef] [PubMed]
  8. A. P. Yalin and V. Surla, "Determination of number density and velocity of sputtered particles by cavity ringdown spectroscopy," presented at The 29th International Electric Propulsion Conference (I.E.P.C., 2005).
  9. K. W. Busch and M. A. Busch, Cavity-Ringdown Spectroscopy: an Ultratrace-Absorption Measurement Technique, ACS Symposium 720 (American Chemical Society, 1999).
  10. G. Berden, R. Peeters, and G. Meijer, "Cavity ring-down spectroscopy: experimental schemes and applications," Int. Rev. Phys. Chem. 19, 565-607 (2000). [CrossRef]
  11. P. Zalicki and R. N. Zare, "Cavity ring-down spectroscopy for quantitative absorption measurements," J. Chem. Phys. 102, 2708-2717 (1995). [CrossRef]
  12. A. P. Yalin and R. N. Zare, "Effect of laser line shape on the quantitative analysis of cavity ring-down signals," Laser Phys. 12, 1065-1072 (2002).
  13. M. J. Pellin, C. E. Young, M. H. Mendelsohn, D. M. Gruen, R. B. Wright, and A. B. Dewald, "Oxygen and titanium sputtering yields as determined by laser fluorescence and auger electron spectroscopy for monolayer oxygen coverage of polycrstalline Ti," J. Nucl. Mater. 111-112, 738-743 (1982). [CrossRef]
  14. W. R. Hudson and B. A. Banks, AIAA Paper No. 73-1131 in Proceedings of 10th AIAA Electric Propulsion Conference (American Institute of Aeronautics and Astronautics, 1973).
  15. A. P. Yalin and V. Surla, "Determination of number density and velocity of sputtered particles by cavity ring-down spectroscopy," Paper No. IEPC-2005-300, in Proceedings of 29th International Electric Propulsion Conference (I.E.P.C. 2005).
  16. Z. L. Zhang and L. Zhang, "Anisotropic angular distributions of sputtered atoms," Radiat. Eff. Defects Solids 159, 301-307 (2004). [CrossRef]
  17. M. Stepanova and S. K. Dew, "Anisotropic energies of sputtered atoms under oblique ion incidence," Nucl. Instrum. Methods Phys. Res. B 215, 357-365 (2004). [CrossRef]
  18. R. E. Jones, Jr., "Theories of distribution of deposit from sputtered disk and rectangular electrodes," IBM. J. Res. Dev. 16, 27-34 (1972). [CrossRef]
  19. A. P. Yalin and V. Surla, "Velocity measurements by cavity ringdown spectroscopy," Opt. Lett. 30, 3219-3221 (2005). [CrossRef] [PubMed]
  20. K. A. Zoerb, J. D. Williams, D. D. Williams, and A. P. Yalin, "Differential sputtering yields of refractory metals by xenon, krypton, and Ar ion bombardment at normal and oblique incidences," in Proceedings of the 29th International Electric Propulsion Conference (I.E.P.C. 2005).
  21. Y. Yamamura and H. Tawara, "Energy dependence of ion-induced sputtering yields from monatomic solids at normal incidence," At. Data Nucl. Data Tables 62, 149-253 (1996). [CrossRef]

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