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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 19 — Jul. 1, 2007
  • pp: 3987–3994

Differential sputter yield measurements using cavity ringdown spectroscopy

Vijay Surla and Azer P. Yalin  »View Author Affiliations


Applied Optics, Vol. 46, Issue 19, pp. 3987-3994 (2007)
http://dx.doi.org/10.1364/AO.46.003987


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Abstract

The first use of cavity ringdown spectroscopy (CRDS) to measure differential (angular) sputter yield profiles of sputtered particles is reported. Owing to the path-integrated nature of CRDS, inversion techniques are required. Our approach is to scan the optical axis relative to the source of sputtered particles and to measure the spatial profile of the CRDS signals. Modeling is then used to determine the differential sputter yield profile from the measured CRDS spatial profile. Demonstrative measurements are made with a Nd:YAG pumped optical parametric oscillator laser system for 750 eV argon ions normally incident on a molybdenum target. At these conditions we find an under- cosine sputtering distribution characterized by a = 0.22 ± 0.07 in good agreement with past quartz crystal microbalance measurements ( a = 0.19 ) .

© 2007 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6780) Instrumentation, measurement, and metrology : Temperature
(300.1030) Spectroscopy : Absorption

ToC Category:
Absorption and Cavity-Based Techniques

History
Original Manuscript: October 13, 2006
Revised Manuscript: January 20, 2007
Manuscript Accepted: February 12, 2007
Published: June 12, 2007

Citation
Vijay Surla and Azer P. Yalin, "Differential sputter yield measurements using cavity ringdown spectroscopy," Appl. Opt. 46, 3987-3994 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-19-3987

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