Metal oxide layers produced by plasma ion-assisted deposition are extensively used for complex optical coatings due to the availability of materials, the high packing density of films, and the smooth surfaces. Stringent optical surface figure specifications necessary for both laser optics and precision optics require film stress to be well-controlled and surface deformation to be corrected or compensated.
© 2007 Optical Society of America
Original Manuscript: August 7, 2006
Manuscript Accepted: September 5, 2006
Jue Wang, Robert L. Maier, and Horst Schreiber, "Wavefront control of SiO2-based ultraviolet narrow-bandpass filters prepared by plasma ion-assisted deposition," Appl. Opt. 46, 175-179 (2007)