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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 20 — Jul. 10, 2007
  • pp: 4294–4303

Interest of broadband optical monitoring for thin-film filter manufacturing

Bruno Badoil, Fabien Lemarchand, Michel Cathelinaud, and Michel Lequime  »View Author Affiliations


Applied Optics, Vol. 46, Issue 20, pp. 4294-4303 (2007)
http://dx.doi.org/10.1364/AO.46.004294


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Abstract

Broadband optical monitoring for thin-film filter manufacturing is more and more developed thanks to better performances of spectrometers with array detectors. We compare this optical monitoring with turning point monitoring and quartz monitoring of different designs. The sensitivity to thickness errors and to refractive index errors is evaluated. We show that real time determination of deposited thickness is a valuable criterion. We also present our experimental setup of transmittance and reflectance broadband optical monitoring. The use of a 400 1000   nm range combined with a signal-to-noise ratio of 2500 in transmittance and 1000 in reflectance permits us to expect the manufacturing of high-performance non-quarter-wave designs. A first manufacturing of an 18-layer non-quarter-wave high-pass filter is provided.

© 2007 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

History
Original Manuscript: November 7, 2006
Revised Manuscript: March 8, 2007
Manuscript Accepted: March 18, 2007
Published: June 20, 2007

Citation
Bruno Badoil, Fabien Lemarchand, Michel Cathelinaud, and Michel Lequime, "Interest of broadband optical monitoring for thin-film filter manufacturing," Appl. Opt. 46, 4294-4303 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-20-4294


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References

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