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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 22 — Aug. 1, 2007
  • pp: 4871–4878

Vacuum ultraviolet coatings of Al protected with MgF2 prepared both by ion-beam sputtering and by evaporation

Mónica Fernández-Perea, Juan I. Larruquert, José A. Aznárez, Alicia Pons, and José A. Méndez  »View Author Affiliations


Applied Optics, Vol. 46, Issue 22, pp. 4871-4878 (2007)
http://dx.doi.org/10.1364/AO.46.004871


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Abstract

Ion-beam sputtering (IBS) and evaporation are the two deposition techniques that have been used to deposit coatings of Al protected with MgF2 with high reflectance in the vacuum ultraviolet down to 115 nm. Evaporation deposited (ED) Al protected with IBS MgF2 resulted in a larger (smaller) reflectance below (above) 125 nm than the well-known all-evaporated coatings. A similar comparison is obtained when the Al film is deposited by IBS instead of evaporation. The lower reflectance of the coatings protected with IBS versus ED MgF2 above 125 nm is because of larger absorption of the former. Both nonprotected IBS Al, as well as IBS Al protected with ED MgF2, resulted in a band of reflectance loss that was peaked at 127 and 157 nm, respectively. This result was attributed to the excitation of surface plasmons due to the enhancement of surface roughness with large spatial wave vectors in the sputter deposition. This reflectance loss for IBS Al protected with MgF2 is small at the short (λ∼120 nm) and long (λ<350 nm) wavelengths investigated. IBS Al protected with ED MgF2 is thus a promising coating for these two spectral regions. Coatings protected with IBS MgF2 resulted in a reflectance as high as coatings protected with ED MgF2 at wavelengths longer than 550 nm, whereas the former had a lower reflectance below this wavelength.

© 2007 Optical Society of America

OCIS Codes
(120.5700) Instrumentation, measurement, and metrology : Reflection
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme
(260.7210) Physical optics : Ultraviolet, vacuum
(310.6860) Thin films : Thin films, optical properties
(350.6090) Other areas of optics : Space optics

ToC Category:
Physical Optics

History
Original Manuscript: December 22, 2006
Manuscript Accepted: March 7, 2007
Published: July 3, 2007

Citation
Mónica Fernández-Perea, Juan I. Larruquert, José A. Aznárez, Alicia Pons, and José A. Méndez, "Vacuum ultraviolet coatings of Al protected with MgF2 prepared both by ion-beam sputtering and by evaporation," Appl. Opt. 46, 4871-4878 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-22-4871

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