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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 22 — Aug. 1, 2007
  • pp: 4871–4878

Vacuum ultraviolet coatings of Al protected with MgF2 prepared both by ion-beam sputtering and by evaporation

Mónica Fernández-Perea, Juan I. Larruquert, José A. Aznárez, Alicia Pons, and José A. Méndez  »View Author Affiliations

Applied Optics, Vol. 46, Issue 22, pp. 4871-4878 (2007)

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Ion-beam sputtering (IBS) and evaporation are the two deposition techniques that have been used to deposit coatings of Al protected with MgF 2 with high reflectance in the vacuum ultraviolet down to 115   nm . Evaporation deposited (ED) Al protected with IBS MgF 2 resulted in a larger (smaller) reflectance below (above) 125   nm than the well-known all-evaporated coatings. A similar comparison is obtained when the Al film is deposited by IBS instead of evaporation. The lower reflectance of the coatings protected with IBS versus ED MgF 2 above 125   nm is because of larger absorption of the former. Both nonprotected IBS Al, as well as IBS Al protected with ED MgF 2 , resulted in a band of reflectance loss that was peaked at 127 and 157   nm , respectively. This result was attributed to the excitation of surface plasmons due to the enhancement of surface roughness with large spatial wave vectors in the sputter deposition. This reflectance loss for IBS Al protected with MgF 2 is small at the short ( λ 120   nm ) and long ( λ > 350   nm ) wavelengths investigated. IBS Al protected with ED MgF 2 is thus a promising coating for these two spectral regions. Coatings protected with IBS MgF 2 resulted in a reflectance as high as coatings protected with ED MgF 2 at wavelengths longer than 550   nm , whereas the former had a lower reflectance below this wavelength.

© 2007 Optical Society of America

OCIS Codes
(120.5700) Instrumentation, measurement, and metrology : Reflection
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme
(260.7210) Physical optics : Ultraviolet, vacuum
(310.6860) Thin films : Thin films, optical properties
(350.6090) Other areas of optics : Space optics

ToC Category:
Physical Optics

Original Manuscript: December 22, 2006
Manuscript Accepted: March 7, 2007
Published: July 3, 2007

Mónica Fernández-Perea, Juan I. Larruquert, José A. Aznárez, Alicia Pons, and José A. Méndez, "Vacuum ultraviolet coatings of Al protected with MgF2 prepared both by ion-beam sputtering and by evaporation," Appl. Opt. 46, 4871-4878 (2007)

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