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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 22 — Aug. 1, 2007
  • pp: 4963–4967

Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements

Takashi Sato, Takeshi Araki, Yoshihiro Sasaki, Toshihide Tsuru, Toshiyasu Tadokoro, and Shojiro Kawakami  »View Author Affiliations


Applied Optics, Vol. 46, Issue 22, pp. 4963-4967 (2007)
http://dx.doi.org/10.1364/AO.46.004963


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Abstract

A portable ellipsometer with a compact static polarimeter using an arrayed polarizer, an arrayed wave plate, and a CCD image sensor is developed. A high level of repeatability at a measurement speed of 0.3 s is demonstrated by measurement of SiO 2 films ranging from 2 to 300   nm in thickness deposited on an Si wafer. There is the potential to realize an ultracompact ellipsometer module by integrating the optical source and receiver, suitable for deployment in a variety of manufacturing equipment and measurement instruments.

© 2007 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5410) Instrumentation, measurement, and metrology : Polarimetry

ToC Category:
Ellipsometry and Polarimetry

History
Original Manuscript: October 23, 2006
Revised Manuscript: April 16, 2007
Manuscript Accepted: April 22, 2007
Published: July 6, 2007

Citation
Takashi Sato, Takeshi Araki, Yoshihiro Sasaki, Toshihide Tsuru, Toshiyasu Tadokoro, and Shojiro Kawakami, "Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements," Appl. Opt. 46, 4963-4967 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-22-4963

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