Deterministic design of binary phase-only blazed grating with subwavelength features under limitation on spatial resolution of fabrication technique
Applied Optics, Vol. 46, Issue 22, pp. 5019-5026 (2007)
http://dx.doi.org/10.1364/AO.46.005019
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Abstract
We propose a deterministic design method of a blazed grating consisting of a binary grating with subwavelength structures for a multilevel phase modulation. The feasible shapes of binary subwavelength microstructures are restricted to a few kinds of surface profiles by constraints in an actual fabrication technique. The relationship between the feasible shapes of binary subwavelength microstructures and their phase modulations can be calculated by an electromagnetic analysis and tabulated. Using the relationship, a deterministic design of a binary grating with subwavelength structures is simply realized. We have designed the binary blazed grating with subwavelength structures and investigated its performance. Its diffraction efficiency is in good agreement with that by a conventional statistical design method.
© 2007 Optical Society of America
OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(050.2770) Diffraction and gratings : Gratings
(230.1950) Optical devices : Diffraction gratings
(230.3990) Optical devices : Micro-optical devices
ToC Category:
Diffraction and Gratings
History
Original Manuscript: January 2, 2007
Revised Manuscript: March 28, 2007
Manuscript Accepted: May 2, 2007
Published: July 6, 2007
Citation
Takehito Oonishi, Tsuyoshi Konishi, and Kazuyoshi Itoh, "Deterministic design of binary phase-only blazed grating with subwavelength features under limitation on spatial resolution of fabrication technique," Appl. Opt. 46, 5019-5026 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-22-5019
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