OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 22 — Aug. 1, 2007
  • pp: 5500–5515

Subsurface damage and microstructure development in precision microground hard ceramics using magnetorheological finishing spots

Shai N. Shafrir, John C. Lambropoulos, and Stephen D. Jacobs  »View Author Affiliations


Applied Optics, Vol. 46, Issue 22, pp. 5500-5515 (2007)
http://dx.doi.org/10.1364/AO.46.005500


View Full Text Article

Acrobat PDF (4808 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We demonstrate the use of spots taken with magnetorheological finishing (MRF) for estimating subsurface damage (SSD) depth from deterministic microgrinding for three hard ceramics: aluminum oxynitride (Al23O27N5/ALON), polycrystalline alumina (Al2O3/PCA), and chemical vapor deposited (CVD) silicon carbide (Si4C/SiC). Using various microscopy techniques to characterize the surfaces, we find that the evolution of surface microroughness with the amount of material removed shows two stages. In the first, the damaged layer and SSD induced by microgrinding are removed, and the surface microroughness reaches a low value. Peak-to-valley (p-v) surface microroughness induced from grinding gives a measure of the SSD depth in the first stage. With the removal of additional material, a second stage develops, wherein the interaction of MRF and the material's microstructure is revealed. We study the development of this texture for these hard ceramics with the use of power spectral density to characterize surface features.

© 2007 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 27, 2007
Manuscript Accepted: April 14, 2007
Published: July 23, 2007

Citation
Shai N. Shafrir, John C. Lambropoulos, and Stephen D. Jacobs, "Subsurface damage and microstructure development in precision microground hard ceramics using magnetorheological finishing spots," Appl. Opt. 46, 5500-5515 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-22-5500

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited