Fabrication of highly rotational symmetric quasi-periodic structures by multiexposure of a three-beam interference technique
Applied Optics, Vol. 46, Issue 23, pp. 5645-5648 (2007)
http://dx.doi.org/10.1364/AO.46.005645
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Abstract
A simple and efficient interference method for fabricating highly symmetric two-dimensional (2-D) quasi-periodic structures (QPSs) is theoretically and experimentally demonstrated. With a three-beam interference technique, one can fabricate a periodic 2-D structure having sixfold symmetry.
When this structure is multiduplicated into other specific orientations its combination results in a QPS with multifold symmetry. By use of n exposures with a rotation angle of
© 2007 Optical Society of America
OCIS Codes
(090.0090) Holography : Holography
(110.5220) Imaging systems : Photolithography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: March 8, 2007
Revised Manuscript: May 2, 2007
Manuscript Accepted: May 30, 2007
Published: August 8, 2007
Citation
Ngoc Diep Lai, Jian Hung Lin, and Chia Chen Hsu, "Fabrication of highly rotational symmetric quasi-periodic structures by multiexposure of a three-beam interference technique," Appl. Opt. 46, 5645-5648 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-23-5645
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