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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 23 — Aug. 10, 2007
  • pp: 5792–5799

Direct-write patterning of indium–tin–oxide film by high pulse repetition frequency femtosecond laser ablation

H. W. Choi, D. F. Farson, J. Bovatsek, A. Arai, and D. Ashkenasi  »View Author Affiliations

Applied Optics, Vol. 46, Issue 23, pp. 5792-5799 (2007)

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Ablation of indium oxide doped with tin oxide (ITO) from glass substrates is described. Laser pulse energy and focus spot size were varied in single-pulse, single-spot ablation tests and for ablation of linear features with scanned multiple pulses. The single-pulse ablation threshold of ITO was smaller than that of the glass substrate so the entire thickness of ITO could be removed in a single pulse or with overlying multiple pulses without the possibility of substrate ablation. Linear features could be created at much higher scanning speeds using a high repetition frequency ( 100   kHz ) Yb fiber amplified laser as compared to a lower repetition frequency ( 2   kHz ) laser. An analysis showed that incubation effects lowered ITO ablation thresholds when pulse frequency was high relative to scanning speed, contributing to large feasible scanning speeds for high pulse frequency lasers.

© 2007 Optical Society of America

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Lasers and Laser Optics

Original Manuscript: January 30, 2007
Manuscript Accepted: March 20, 2007
Published: August 10, 2007

H. W. Choi, D. F. Farson, J. Bovatsek, A. Arai, and D. Ashkenasi, "Direct-write patterning of indium-tin-oxide film by high pulse repetition frequency femtosecond laser ablation," Appl. Opt. 46, 5792-5799 (2007)

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  1. B. J. Luff, J. S. Wilkinson, and G. Perrone, "Indium tin oxide overlayered waveguides for sensor applications," Appl. Opt. 36, 7066-7072 (1997). [CrossRef]
  2. R. Bel Hadj Tahar, T. Ban, Y. Ohya, and Y. Takahashi, "Tin doped indium oxide thin films: electrical properties," J. Appl. Phys. 83, 2631-2645 (1998). [CrossRef]
  3. O. Yavas and M. Takai, "Effect of substrate absorption on the efficiency of laser patterning of indium tin oxide thin films," J. Appl. Phys. 85, 4207-4212 (1999). [CrossRef]
  4. Y. H. Tak, C. N. Kim, M. S. Kim, K. B. Kim, M. H. Lee, and S. T. Kim, "Novel patterning method using Nd:YAG and Nd:YVO4 lasers for organic light emitting diodes," Synth. Met. 138, 497-500 (2003). [CrossRef]
  5. C. Molpeceres, S. Lauzurica, J. L. Ocana, J. J. Gandia, L. Urbina, and J. Carabe, "Microprocessing of ITO and a-Si thin films using ns laser sources," J. Micromech. Microeng. 15, 1271-1278 (2005). [CrossRef]
  6. M. Giridhar, K. Seong, A. Schulzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, "Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices," Appl. Opt. 43, 4584-4589 (2004). [CrossRef] [PubMed]
  7. C. H. Fan and J. P. Longtin, "Modeling optical breakdown in dielectrics during ultrafast laser processing," Appl. Opt. 40, 3124-3131 (2001). [CrossRef]
  8. M. Elbandrawy and M. Gupta, "Optical characteristics of femtosecond laser micromachined periodic structures in Si ‹100›," Appl. Opt. 45, 7137-7143 (2006). [CrossRef] [PubMed]
  9. R. Stoian, D. Ashkenasi, A. Rosenfeld, and E. E. B. Campbell, "Coulomb explosion in ultrashort pulsed laser ablation of Al2O3," Phys. Rev. B 62, 13167-13173 (2000). [CrossRef]
  10. J. Krüger and W. Kautek, "Ultrashort pulse laser interaction with dielectrics and polymers," Adv. Polym. Sci. 168, 247-289 (2004).
  11. D. Ashkenasi, G. Muller, A. Rosenfeld, R. Stoian, I. V. Hertel, N. M. Bulgakova, and E. E. B. Campbell, "Fundamentals and advantages of ultrafast micro-structuring of transparent materials," Appl. Phys. A 77, 223-228 (2003).
  12. A. Ben-Yakar and R. L. Byer, "Femtosecond laser ablation properties of borosilicate glass," J. Appl. Phys. 96, 5316-5323 (2004). [CrossRef]
  13. D. Ashkenasi, M. Lorenz, R. Stoian, and A. Rosenfeld, "Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation," Appl. Surf. Sci. 150, 101-106 (1999). [CrossRef]
  14. J. R. Buckley, F. W. Wise, F. O. Ilday, and T. Sosnowski, "Femtosecond fiber lasers with pulse energies above 10 nJ," Opt. Lett. 30, 1888-1890 (2005). [CrossRef] [PubMed]
  15. L. Shah, Z. L. Liu, I. Hartl, G. Imeshev, G. C. Cho, and M. E. Fermann, "High energy femtosecond Yb cubicon fiber amplifier," Opt. Express 13, 4717-4722 (2005). [CrossRef] [PubMed]
  16. B. Fisette and M. Meunier, "Three-dimensional microfabrication inside photosensitive glasses by femtosecond laser," Laser Micro/Nanoeng. 1, 7-11 (2006). [CrossRef]
  17. B. Salle, O. Gobert, P. Meynadier, M. Perdrix, G. Petite, and A. Semerok, "Femtosecond and picosecond laser microablation: ablation efficiency and laser microplasma expansion," Appl. Phys. A 69, S381-S383 (1999). [CrossRef]
  18. S. M. Klimentov, T. V. Kononenko, P. A. Pivovarov, S. V. Garnov, V. I. Konov, A. M. Prokhorov, D. Breitling, and F. Dausinger, "The role of plasma in ablation of materials by ultrashort laser pulses," Quantum Electron. 31, 378-382 (2001). [CrossRef]

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