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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 23 — Aug. 10, 2007
  • pp: 5792–5799

Direct-write patterning of indium–tin–oxide film by high pulse repetition frequency femtosecond laser ablation

H. W. Choi, D. F. Farson, J. Bovatsek, A. Arai, and D. Ashkenasi  »View Author Affiliations


Applied Optics, Vol. 46, Issue 23, pp. 5792-5799 (2007)
http://dx.doi.org/10.1364/AO.46.005792


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Abstract

Ablation of indium oxide doped with tin oxide (ITO) from glass substrates is described. Laser pulse energy and focus spot size were varied in single-pulse, single-spot ablation tests and for ablation of linear features with scanned multiple pulses. The single-pulse ablation threshold of ITO was smaller than that of the glass substrate so the entire thickness of ITO could be removed in a single pulse or with overlying multiple pulses without the possibility of substrate ablation. Linear features could be created at much higher scanning speeds using a high repetition frequency ( 100   kHz ) Yb fiber amplified laser as compared to a lower repetition frequency ( 2   kHz ) laser. An analysis showed that incubation effects lowered ITO ablation thresholds when pulse frequency was high relative to scanning speed, contributing to large feasible scanning speeds for high pulse frequency lasers.

© 2007 Optical Society of America

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: January 30, 2007
Manuscript Accepted: March 20, 2007
Published: August 10, 2007

Citation
H. W. Choi, D. F. Farson, J. Bovatsek, A. Arai, and D. Ashkenasi, "Direct-write patterning of indium-tin-oxide film by high pulse repetition frequency femtosecond laser ablation," Appl. Opt. 46, 5792-5799 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-23-5792

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