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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 23 — Aug. 10, 2007
  • pp: 5800–5804

Extension of distance measurement range in a sinusoidal wavelength-scanning interferometer using a liquid-crystal wavelength filter with double feedback control

Osami Sasaki, Akihiro Saito, Takamasa Suzuki, Mitsuo Takeda, and Takashi Kurokawa  »View Author Affiliations

Applied Optics, Vol. 46, Issue 23, pp. 5800-5804 (2007)

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The optical path difference (OPD) and amplitude of a sinusoidal wavelength scanning (SWS) are controlled with a double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength. A liquid-crystal Fabry–Perot interferometer (LC-FPI) is adopted as a wavelength-scanning device, and double sinusoidal phase modulation is incorporated in the SWS interferometer. Because of a high resolution of the LC-FPI, the upper limit of the measurement range can be extended to 280 μ m by the use of the phase lock where the amplitude of the SWS is doubled in the feedback control. The ruler marking every wavelength is generated between 80 μ m and 280 μ m , and distances are measured with a high accuracy of the order of a nanometer in real time.

© 2007 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(230.3720) Optical devices : Liquid-crystal devices

ToC Category:

Original Manuscript: May 8, 2007
Manuscript Accepted: June 15, 2007
Published: August 9, 2007

Osami Sasaki, Akihiro Saito, Takamasa Suzuki, Mitsuo Takeda, and Takashi Kurokawa, "Extension of distance measurement range in a sinusoidal wavelength-scanning interferometer using a liquid-crystal wavelength filter with double feedback control," Appl. Opt. 46, 5800-5804 (2007)

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  1. P. de Groot and S. Kishner, "Synthetic wavelength stabilization for two-color laser-diode interferometry," Appl. Opt. 30, 4026-4033 (1991). [CrossRef] [PubMed]
  2. R. Onodera and Y. Ishii, "Two-wavelength laser-diode interferometer with fractional fringe techniques," Appl. Opt. 34, 4740-4746 (1995). [CrossRef] [PubMed]
  3. T. Suzuki, K. Kobayashi, and O. Sasaki, "Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode," Appl. Opt. 39, 2646-2652 (2000). [CrossRef]
  4. S. Kuwamura and I. Yamaguchi, "Wavelength scanning profilometry for real-time surface shape measurement," Appl. Opt. 36, 4473-4482 (1997). [CrossRef] [PubMed]
  5. F. Lexer, C. K. Hitzenberger, A. F. Fercher, and M. Kulhavy, "Wavelength-tuning interferometry of intraocular distances," Appl. Opt. 36, 6548-6553 (1997). [CrossRef]
  6. T. Li, R. G. May, A. Wang, and R. O. Claus, "Optical scanning extrinsic Fabry-Perot interferometer for absolute microdisplacement measurement," Appl. Opt. 36, 8859-8861 (1997). [CrossRef]
  7. X. Dai and K. Seta, "High-accuracy absolute disatnace measurement by means of wavelength scanning heterodyne interferometry," Meas. Sci. Technol. 9, 1013-1035 (1998).
  8. O. Sasaki, N. Murata, and T. Suzuki, "Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement," Appl. Opt. 39, 4589-4592 (2000). [CrossRef]
  9. T. Suzuki, O. Sasaki, and T. Maruyama, "Phase-locked laser diode interferometry for surface profile measurement," Appl. Opt. 28, 4407-4410 (1989). [CrossRef] [PubMed]
  10. O. Sasaki, K. Akiyama, and T. Suzuki, "Sinusoidal-wavelength-scanning interferometer with double feedback control for real-time distance measurement," Appl. Opt. 41, 3906-3910 (2002). [CrossRef] [PubMed]
  11. M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Kurokawa, "Optical frequency-domain microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device," Appl. Opt. 38, 7063-7068 (1999). [CrossRef]
  12. O. Sasaki, T. Yoshida, and T. Suzuki, "Double sinusoidal phase-modulating laser diode interferometer for distance measurement," Appl. Opt. 30, 3617-3621 (1991). [CrossRef] [PubMed]

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