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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 23 — Aug. 10, 2007
  • pp: 5800–5804

Extension of distance measurement range in a sinusoidal wavelength-scanning interferometer using a liquid-crystal wavelength filter with double feedback control

Osami Sasaki, Akihiro Saito, Takamasa Suzuki, Mitsuo Takeda, and Takashi Kurokawa  »View Author Affiliations


Applied Optics, Vol. 46, Issue 23, pp. 5800-5804 (2007)
http://dx.doi.org/10.1364/AO.46.005800


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Abstract

The optical path difference (OPD) and amplitude of a sinusoidal wavelength scanning (SWS) are controlled with a double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength. A liquid-crystal Fabry–Perot interferometer (LC-FPI) is adopted as a wavelength-scanning device, and double sinusoidal phase modulation is incorporated in the SWS interferometer. Because of a high resolution of the LC-FPI, the upper limit of the measurement range can be extended to 280 μ m by the use of the phase lock where the amplitude of the SWS is doubled in the feedback control. The ruler marking every wavelength is generated between 80 μ m and 280 μ m , and distances are measured with a high accuracy of the order of a nanometer in real time.

© 2007 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(230.3720) Optical devices : Liquid-crystal devices

ToC Category:
Interferometry

History
Original Manuscript: May 8, 2007
Manuscript Accepted: June 15, 2007
Published: August 9, 2007

Citation
Osami Sasaki, Akihiro Saito, Takamasa Suzuki, Mitsuo Takeda, and Takashi Kurokawa, "Extension of distance measurement range in a sinusoidal wavelength-scanning interferometer using a liquid-crystal wavelength filter with double feedback control," Appl. Opt. 46, 5800-5804 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-23-5800


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References

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