Abstract
A new cost-efficient sputter-slice technology for hard x-ray Fresnel zone plates fabrication, imposing no limitation to aspect ratio, is proposed. By means of a plasma chemical process, glassy film multilayer structures are deposited on a lateral surface of a silica rod, outermost layers being as thin as . It has been shown by numerical simulation that for germanium fraction, zone plate thickness and the number of zones of about 1000, first order diffraction efficiency as high as 20%–30% at the energy of approximately 20 keV can be achieved.
© 2007 Optical Society of America
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