A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analyzed optically based on spectrophotometric and spectroscopic ellipsometry measurements under different angles of incidence in order to precisely characterize the coatings. The Lorentz–Lorenz model has been used to calculate the refractive index of material mixtures in gradient and constant index layers of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition.
© 2007 Optical Society of America
Original Manuscript: December 7, 2006
Revised Manuscript: April 12, 2007
Manuscript Accepted: June 26, 2007
Published: August 14, 2007
Vesna Janicki, Jordi Sancho-Parramon, Olaf Stenzel, Marc Lappschies, Björn Görtz, Christoph Rickers, Christina Polenzky, and Uwe Richter, "Optical characterization of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements," Appl. Opt. 46, 6084-6091 (2007)