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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 26 — Sep. 10, 2007
  • pp: 6572–6576

Coupling of surface roughness to the performance of computer-generated holograms

Ping Zhou and Jim Burge  »View Author Affiliations


Applied Optics, Vol. 46, Issue 26, pp. 6572-6576 (2007)
http://dx.doi.org/10.1364/AO.46.006572


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Abstract

Computer-generated holograms (CGHs), such as those used in optical testing, are created by etching patterns into an optical substrate. Imperfections in the etching can cause small scale surface roughness that varies across the pattern. The variation in this roughness affects the phase and amplitude of the wavefronts in the various diffraction orders. A simplified model is developed and validated that treats the scattering loss from the roughness as an amplitude effect. We demonstrate the use of this model for engineering analysis and provide a graphical method for understanding the application. Furthermore, we investigate the magnitude of this effect for the application of optical testing and show that the effect on measurement accuracy is limited to 1 n m for typical CGHs.

© 2007 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.2770) Diffraction and gratings : Gratings

ToC Category:
Diffraction and Gratings

History
Original Manuscript: April 23, 2007
Manuscript Accepted: July 3, 2007
Published: September 5, 2007

Citation
Ping Zhou and Jim Burge, "Coupling of surface roughness to the performance of computer-generated holograms," Appl. Opt. 46, 6572-6576 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-26-6572


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References

  1. T. K. Gaylord and M. G. Moharam, "Analysis and applications of optical diffraction by gratings," Proc. IEEE 73, 894-937 (1985). [CrossRef]
  2. P. Zhou and J. H. Burge, "Fabrication error analysis and experimental demonstration for computer-generated holograms," Appl. Opt. 46, (2007). [CrossRef] [PubMed]
  3. Y. C. Chang and J. H. Burge, "Errors analysis for CGH optical testing," Proc. SPIE 3782, 358-366 (1999). [CrossRef]
  4. Y. C. Chang, P. Zhou, and J. H. Burge, "Analysis of phase sensitivity for binary computer generated holograms," Appl. Opt. 45, 4223-4234 (2006). [CrossRef] [PubMed]
  5. D. W. Ricks and L. V. Chizek, "Light scattering from binary optics," Proc. SPIE 1211, 24-37 (1990). [CrossRef]
  6. C. Saxer and K. Freischlad, "Interference microscope for sub-Angstrom surface roughness measurement," Proc. SPIE 5144, 37-45 (2003). [CrossRef]

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