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Applied Optics

Applied Optics

  • Editor: James C. Wyant
  • Vol. 46, Iss. 27 — Sep. 20, 2007
  • pp: 6793–6803

Optics InfoBase > Applied Optics > Volume 46 > Issue 27 > Page 6793

Direct bonding and beyond

Jan Haisma, Nico Hattu, J. T. C. M. (Dook) Pulles, Esther Steding, and Jan C. G. Vervest

Applied Optics, Vol. 46, Issue 27, pp. 6793-6803        doi:10.1364/AO.46.006793

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  • OCIS Codes:
  • (120.4610) Instrumentation, measurement, and metrology : Optical fabrication
  • (160.2750) Materials : Glass and other amorphous materials
  • (220.4000) Optical design and fabrication : Microstructure fabrication
ToC Category:
Optics at Surfaces

Citation
Jan Haisma, Nico Hattu, J. T. C. M. (Dook) Pulles, Esther Steding, and Jan C. G. Vervest, "Direct bonding and beyond," Appl. Opt. 46, 6793-6803 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-27-6793

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Abstract

We present a number of recent evaluations of direct bonding, a glueless bonding technology, performed under ambient conditions. If combined with bond-strengthening, this geometry-conserving technology is well suited for an application in far ultraviolet immersion lithography. Our term beyond direct bonding refers to taking at least one additional technological step beyond direct bonding, involving chemical interface engineering, advanced silicon-on-insulator (SOI) technology, whereby the unwanted influence of dilatation mismatch is obviated. The combination of successive direct bonding, nanopillar lattice structures and silicon-technological engineering makes it possible for us to arrange quantum dots, wires, and planes in a transversal cascade. We also address the interrelationship between direct bonding and elasticity, as well as plasticity; the latter is in relation to direct bonded glass wafers that are thermally treated to create the geometric shape, e.g., required for specific lab-on-a-chip components with a three-dimensional overall configuration.

© 2007 Optical Society of America

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History
Original Manuscript: March 6, 2007
Manuscript Accepted: June 8, 2007
Revised Manuscript: May 23, 2007
Published: September 19, 2007

References

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Author Affiliations

Jan Haisma, Nico Hattu, J. T. C. M. (Dook) Pulles, Esther Steding, Jan C. G. Vervest

Louwers Glass & Ceramics Technologies

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