Design considerations for the absolute testing approach of aspherics using combined diffractive optical elements
Applied Optics, Vol. 46, Issue 28, pp. 7040-7048 (2007)
http://dx.doi.org/10.1364/AO.46.007040
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Abstract
Aspheric optical surfaces are often tested using diffractive optics as null elements. For precise measurements, the errors caused by the diffractive optical element must be calibrated. Recently, we reported first experimental results of a three position quasi-absolute test for rotationally invariant aspherics by using combined-diffractive optical elements (combo-DOEs). Here we investigate the effects of the DOE substrate errors on the proposed calibration procedure and present a set of criteria for designing an optimized combo-DOE. It is demonstrated that this optimized design enhances the overall consistency of the procedure. Furthermore, the rotationally varying part of the surface deviations is compared with the rotationally varying deviations obtained by an N-position averaging procedure and is found to be in good agreement.
© 2007 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: May 31, 2007
Revised Manuscript: August 8, 2007
Manuscript Accepted: August 10, 2007
Published: September 27, 2007
Citation
Gufran S. Khan, Klaus Mantel, Irina Harder, Norbert Lindlein, and Johannes Schwider, "Design considerations for the absolute testing approach of aspherics using combined diffractive optical elements," Appl. Opt. 46, 7040-7048 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-28-7040
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