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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 28 — Oct. 1, 2007
  • pp: 7061–7067

Functional integrated optical elements for beam shaping with coherence scrambling property, realized by interference lithography

Matthias Burkhardt and Robert Brunner  »View Author Affiliations


Applied Optics, Vol. 46, Issue 28, pp. 7061-7067 (2007)
http://dx.doi.org/10.1364/AO.46.007061


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Abstract

Many applications, such as semiconductor lithography and material processing, require the shaping of laser beams to provide a homogenous field illumination. We present the conception, implementation, and experimental verification of a combined single-element homogenizer. Additionally, for excimer laser applications, the concept is associated with a coherence scrambling capability. We used the technique of holographic interference lithography to integrate the multifunctional properties in a diffractive optical element. The wavelength difference between the recording process ( 457.9   nm ) and the application ( 193   nm ) results in a change of the imaging properties and requires a geometrical adaptation of the optical setup. The coherence scrambling effect of the setup is based on an off-axis design, including the beam shaping diffractive structure.

© 2007 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(090.2890) Holography : Holographic optical elements
(140.2180) Lasers and laser optics : Excimer lasers
(140.3390) Lasers and laser optics : Laser materials processing
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: June 22, 2007
Manuscript Accepted: July 25, 2007
Published: September 27, 2007

Citation
Matthias Burkhardt and Robert Brunner, "Functional integrated optical elements for beam shaping with coherence scrambling property, realized by interference lithography," Appl. Opt. 46, 7061-7067 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-28-7061

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