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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 29 — Oct. 10, 2007
  • pp: 7268–7274

Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement

Hai Huan, Osami Sasaki, and Takamasa Suzuki  »View Author Affiliations


Applied Optics, Vol. 46, Issue 29, pp. 7268-7274 (2007)
http://dx.doi.org/10.1364/AO.46.007268


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Abstract

Interference fringes with different periods are projected on an object surface. There is a constant phase point where the phase of the fringe is kept at a constant value while the period is scanning. Multiple optical fields with different periods on the object surface are made from detected phases of the fringes. The multiple optical fields are backpropagated to the constant phase point of the phase where all of the phases of the multiple backpropagated fields become the same value and the amplitude of the sum of the multiple backpropagated fields becomes maximum. The distance of the backpropagation provides the position of the object surface. Some experiments show that this method can measure an object surface with discontinuities of several millimeters with high accuracy of several micrometers.

© 2007 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Interferometry

History
Original Manuscript: March 7, 2007
Revised Manuscript: August 29, 2007
Manuscript Accepted: August 30, 2007
Published: October 8, 2007

Citation
Hai Huan, Osami Sasaki, and Takamasa Suzuki, "Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement," Appl. Opt. 46, 7268-7274 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-29-7268

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