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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 3 — Jan. 20, 2007
  • pp: 302–306

Improved silica–zirconia sol synthesisfor fabrication of a single-mode embedded dielectric channel waveguide with low transmission losses

M. He, X.-C. Yuan, J. Bu, and B. H. Ong  »View Author Affiliations

Applied Optics, Vol. 46, Issue 3, pp. 302-306 (2007)

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A novel inorganic–organic hybrid silica–zirconia solgel material, which can generate 10   μm thick film in a single spin-coatingprocess, has been developed and employed in the fabrication of an embedded dielectric channel waveguide on a silica buffer layer of a silicon substrate. The fabricated channel waveguide core had steep ridge walls, good smoothness, and high robustness, and the novel sol synthesisenabled a precise control of the geometrical and optical parameters of the embedded dielectric channel waveguide. In the 1 .55   μm telecommunication window, the fundamental modes TE 00 and TM 00 in the embedded channel waveguide had low transmission losses of 0.40 ± 0.03 dB / cm and 0.59 ± 0.03 dB / cm , respectively.

© 2007 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(230.7380) Optical devices : Waveguides, channeled

ToC Category:

Original Manuscript: July 28, 2006
Manuscript Accepted: September 5, 2006
Published: January 4, 2007

M. He, X.-C. Yuan, J. Bu, and B. H. Ong, "Improved silica-zirconia sol synthesis for fabrication of a single-mode embedded dielectric channel waveguide with low transmission losses," Appl. Opt. 46, 302-306 (2007)

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