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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 31 — Nov. 1, 2007
  • pp: 7625–7630

Fault localization and analysis in semiconductor devices with optical-feedback infrared confocal microscopy

Raymund Sarmiento, Vernon Julius Cemine, Imee Rose Tagaca, Arnel Salvador, Carlo Mar Blanca, and Caesar Saloma  »View Author Affiliations

Applied Optics, Vol. 46, Issue 31, pp. 7625-7630 (2007)

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We report on a cost-effective optical setup for characterizing light-emitting semiconductor devices with optical-feedback confocal infrared microscopy and optical beam-induced resistance change. We utilize the focused beam from an infrared laser diode to induce local thermal resistance changes across the surface of a biased integrated circuit (IC) sample. Variations in the multiple current paths are mapped by scanning the IC across the focused beam. The high-contrast current maps allow accurate differentiation of the functional and defective sites, or the isolation of the surface-emitting p-i-n devices in the IC. Optical beam-induced current (OBIC) is not generated since the incident beam energy is lower than the bandgap energy of the p-i-n device. Inhomogeneous current distributions in the IC become apparent without the strong OBIC background. They are located at a diffraction-limited resolution by referencing the current maps against the confocal reflectance image that is simultaneously acquired via optical-feedback detection. Our technique permits the accurate identification of metal and semiconductor sites as well as the classification of different metallic structures according to thickness, composition, or spatial inhomogeneity.

© 2007 Optical Society of America

OCIS Codes
(040.6040) Detectors : Silicon
(110.4190) Imaging systems : Multiple imaging
(120.6810) Instrumentation, measurement, and metrology : Thermal effects
(180.1790) Microscopy : Confocal microscopy

ToC Category:

Original Manuscript: June 11, 2007
Manuscript Accepted: August 30, 2007
Published: October 23, 2007

Raymund Sarmiento, Vernon Julius Cemine, Imee Rose Tagaca, Arnel Salvador, Carlo Mar Blanca, and Caesar Saloma, "Fault localization and analysis in semiconductor devices with optical-feedback infrared confocal microscopy," Appl. Opt. 46, 7625-7630 (2007)

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