OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 34 — Dec. 1, 2007
  • pp: 8346–8350

Effective formation method for an aspherical microlens array based on an aperiodic moving mask during exposure

Lifang Shi, Chunlei Du, Xiaochun Dong, Qiling Deng, and Xiangang Luo  »View Author Affiliations


Applied Optics, Vol. 46, Issue 34, pp. 8346-8350 (2007)
http://dx.doi.org/10.1364/AO.46.008346


View Full Text Article

Enhanced HTML    Acrobat PDF (840 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An aperiodic mask design method for fabricating a microlens array with an aspherical profile is proposed. The nonlinear relationship between exposure doses and lens profile is considered, and the select criteria of quantization interval and fabrication range of the method are given. The mask function of a quadrangle microlens array with a hyperboloid profile used in the infrared was constructed by using this method. The microlens array can be effectively fabricated during a one time exposure process using the mask. Reactive ion etching was carried out to transfer the structure into the substrate of germanium. The measurement results indicate that the roughness is less than 10 ‚ÄČ nm (pv), and the profile error is less than 40 nm (rms).

© 2007 Optical Society of America

OCIS Codes
(080.3620) Geometric optics : Lens system design
(080.3630) Geometric optics : Lenses
(220.4000) Optical design and fabrication : Microstructure fabrication

History
Original Manuscript: September 4, 2007
Revised Manuscript: October 8, 2007
Manuscript Accepted: October 16, 2007
Published: November 30, 2007

Citation
Lifang Shi, Chunlei Du, Xiaochun Dong, Qiling Deng, and Xiangang Luo, "Effective formation method for an aspherical microlens array based on an aperiodic moving mask during exposure," Appl. Opt. 46, 8346-8350 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-34-8346

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited