OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 35 — Dec. 10, 2007
  • pp: 8385–8393

Network search method in the design of extreme ultraviolet lithographic objectives

Oana Marinescu and Florian Bociort  »View Author Affiliations


Applied Optics, Vol. 46, Issue 35, pp. 8385-8393 (2007)
http://dx.doi.org/10.1364/AO.46.008385


View Full Text Article

Enhanced HTML    Acrobat PDF (721 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The merit function space of mirror system for extreme ultraviolet (EUV) lithography is studied. Local minima situated in the multidimensional optical merit function space are connected via links that contain saddle points and form a network. We present networks for EUV lithographic objective designs and discuss how these networks change when control parameters, such as aperture and field, are varied, and constraints are used to limit the variation domain of the variables. A good solution in a network, obtained with a limited number of variables, has been locally optimized with all variables to meet practical requirements.

© 2007 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.2740) Optical design and fabrication : Geometric optical design
(220.3620) Optical design and fabrication : Lens system design
(220.3740) Optical design and fabrication : Lithography
(220.4830) Optical design and fabrication : Systems design

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: July 16, 2007
Revised Manuscript: October 14, 2007
Manuscript Accepted: October 16, 2007
Published: December 3, 2007

Citation
Oana Marinescu and Florian Bociort, "Network search method in the design of extreme ultraviolet lithographic objectives," Appl. Opt. 46, 8385-8393 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-35-8385

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited