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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 36 — Dec. 20, 2007
  • pp: 8609–8618

Apparatus designed for very accurate measurement of the optical reflection

Hervé Piombini and Philippe Voarino  »View Author Affiliations

Applied Optics, Vol. 46, Issue 36, pp. 8609-8618 (2007)

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The described instrument is a new reflectometer designed to check the normal specular reflectance of 40000 reflectors necessary for the Laser Megajoule (LMJ). This new reflectometer has a high accuracy over the 400 950   nm wavelength range and allows the delicate measurement of shaped parts. The measurements are relative and several reference mirrors, which are low loss dielectric mirrors [ R ( λ ) > 99.9 % ] , are used for the standardization. The apparatus gives an excellent repeatability ( < 0.06 % at 2σ) thanks to its design and automatic focalization imaging system. After a brief review that is related to performance evolution of the spectrophotometers, our facility and its components are described. The methodology of focusing and calibration are explained. The capabilities of our device are illustrated through some measurements realized on flat or shaped samples.

© 2007 Optical Society of America

OCIS Codes
(120.1840) Instrumentation, measurement, and metrology : Densitometers, reflectometers
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5700) Instrumentation, measurement, and metrology : Reflection
(310.3840) Thin films : Materials and process characterization

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 14, 2007
Revised Manuscript: July 4, 2007
Manuscript Accepted: October 15, 2007
Published: December 18, 2007

Hervé Piombini and Philippe Voarino, "Apparatus designed for very accurate measurement of the optical reflection," Appl. Opt. 46, 8609-8618 (2007)

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