We investigate the influence of the binding layer on the reflectance of a Au film in vacuum ultraviolet (VUV) wavelength region theoretically and experimentally. The reflectance of Au films on quartz glass substrates with an ~2 nm binding layer of Ti, Cr, and Ir are estimated and fabricated. Their reflectance in the 115-140 nm wavelength region are measured continuously by the reflectometer located in the National Synchroton Radiation Laboratory. The testing results show that the addition of the binding layer indeed greatly enhances the interfacial adhesion of the Au layer to the quartz glass substrate, but it also exerts a considerably adverse impact on the reflectance of the Au layer in VUV wavelength region. In near normal incidence, the reflectance of the Au layer with a 2 nm thick binding layer is less than 20%, ~5% lower than those without the binding layer. The material used for the binding layer has little impact on the reflectance if this layer is thin enough.
© 2007 Optical Society of America
Original Manuscript: August 31, 2007
Revised Manuscript: November 9, 2007
Manuscript Accepted: November 14, 2007
Published: December 19, 2007
Gan Shuyi, Hong Yilin, Xu Xiangdong, Liu Yin, Zhou Hongjun, Huo Tonglin, and Fu Shaojun, "Influence of binding layer on the reflective performance of a Au film in vacuum ultraviolet wavelength region," Appl. Opt. 46, 8641-8644 (2007)