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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 5 — Feb. 10, 2007
  • pp: 664–668

Improved Fourier-transform profilometry

Xianfu Mao, Wenjing Chen, and Xianyu Su  »View Author Affiliations


Applied Optics, Vol. 46, Issue 5, pp. 664-668 (2007)
http://dx.doi.org/10.1364/AO.46.000664


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Abstract

An improved optical geometry of the projected-fringe profilometry technique, in which the exit pupil of the projecting lens and the entrance pupil of the imaging lens are neither at the same height above the reference plane nor coplanar, is discussed and used in Fourier-transform profilometry. Furthermore, an improved fringe-pattern description and phase-height mapping formula based on the improved geometrical generalization is deduced. Employing the new optical geometry, it is easier for us to obtain the full-field fringe by moving either the projector or the imaging device. Therefore the new method offers a flexible way to obtain reliable height distribution of a measured object.

© 2007 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 30, 2006
Manuscript Accepted: September 26, 2006
Published: January 25, 2007

Citation
Xianfu Mao, Wenjing Chen, and Xianyu Su, "Improved Fourier-transform profilometry," Appl. Opt. 46, 664-668 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-5-664

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