Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method
Applied Optics, Vol. 46, Issue 6, pp. 867-871 (2007)
http://dx.doi.org/10.1364/AO.46.000867
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Abstract
A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter.
© 2007 Optical Society of America
OCIS Codes
(120.2440) Instrumentation, measurement, and metrology : Filters
(230.3120) Optical devices : Integrated optics devices
(230.4170) Optical devices : Multilayers
(310.1860) Thin films : Deposition and fabrication
(330.6110) Vision, color, and visual optics : Spatial filtering
ToC Category:
Optical Devices
History
Original Manuscript: June 9, 2006
Revised Manuscript: October 9, 2006
Manuscript Accepted: October 10, 2006
Published: February 2, 2007
Citation
Hongfei Jiao, Yonggang Wu, Guoxun Tian, Shaowei Wang, Hong Cao, Li Zhang, and Lianxiao Fu, "Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method," Appl. Opt. 46, 867-871 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-6-867
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