OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 6 — Feb. 20, 2007
  • pp: 867–871

Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method

Hongfei Jiao, Yonggang Wu, Guoxun Tian, Shaowei Wang, Hong Cao, Li Zhang, and Lianxiao Fu  »View Author Affiliations

Applied Optics, Vol. 46, Issue 6, pp. 867-871 (2007)

View Full Text Article

Enhanced HTML    Acrobat PDF (1787 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter.

© 2007 Optical Society of America

OCIS Codes
(120.2440) Instrumentation, measurement, and metrology : Filters
(230.3120) Optical devices : Integrated optics devices
(230.4170) Optical devices : Multilayers
(310.1860) Thin films : Deposition and fabrication
(330.6110) Vision, color, and visual optics : Spatial filtering

ToC Category:
Optical Devices

Original Manuscript: June 9, 2006
Revised Manuscript: October 9, 2006
Manuscript Accepted: October 10, 2006
Published: February 2, 2007

Hongfei Jiao, Yonggang Wu, Guoxun Tian, Shaowei Wang, Hong Cao, Li Zhang, and Lianxiao Fu, "Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method," Appl. Opt. 46, 867-871 (2007)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. M. Aziz, P. Meissner, and Th. Hermes, "WDM system integration of micromachined tunable two-chip Fabry-Pérot filters," J. Opt. Commun. 208, 61-68 (2002). [CrossRef]
  2. C. Martinez, B. Hoarau, L. Chirossel, O. Jacquin, and C. Guidoux, "Advanced spectral filtering functionalities in ion-exchanged waveguides with artificial cladding gratings," J. Opt. Commun. 233, 97-106 (2004). [CrossRef]
  3. J. Nanshan, "The study and manufacture of variable filters used in linear detectors and area arrays detectors," Opt. Precision Eng. 1, 27-35 (1993) (in Chinese).
  4. S. Vallon, P. Chevallier, L. Guiziou, G. Alibert, L. S. How Kee Chun, and N. Boos, "40-band integrated static gain-flattening filter," IEEE Photon. Technol. Lett. 15, 554-556 (2003). [CrossRef]
  5. Y. Wu, G. Tian, Z. Wang, and X. Lin, "Design and modification of adjustable double channel filter," Chinese patent 200410053814.8 (2 March 2005).
  6. Y. Yan, L. Zhu, L. Zhang, Y. Huang, S. Zhang, and W. Zhang, "5.30 μm bandpass filter," Chinese patent 00249226.1 (8 August 2001).
  7. F. Zhu, F. Zhang, L. Kong, W. Zhang, B. Xun, C. Xu, and Z. Ge, "3.47 μm narrowband filter," Chinese patent 93226790.4 (24 August 1994).
  8. S. Kaushik and B. R. Stallard, "A two dimensional array of optical interference filters produced by lithographic alterations of the index of refraction," in Application andTheory of Periodic Structures, T. Jannson, ed., Proc. SPIE 2532, 276-281 (1995).
  9. S. Wang, L. Wang, Y. Wu, Z. Wang, D. Liu, B. Lin, X. Chen, and W. Lu, "Arrays of narrow bandpass filters fabricated by combinatorial etching technique," Acta Opt. Sin. 26, 746-751 (2006) (in Chinese).
  10. G. Tian, Y. Wu, Z. Wang, X. Lin, Y. Wang, T. Qi, and L. Chen, "Design and modification of double channel of one-dimensional photonic crystal," Acta Opt. Sin. 25, 661-663 (2005) (in Chinese).
  11. J. Nasrullah, G. Leonard Tyler, and Y. Nishi, "An atomic force microscope study of surface roughness of thin silicon films deposited on SiO2," IEEE Trans. Nanotechnol. 4, 303-311 (2005). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited