Optically addressed microelectromechanical systems driven with high-frequency modulated light
Applied Optics, Vol. 46, Issue 8, pp. 1194-1200 (2007)
http://dx.doi.org/10.1364/AO.46.001194
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Abstract
We propose and analyze a new mode of operation for an optically addressed deformable mirror device. The device consists of an array of metallized membrane mirrors supported above an optically addressed photoconductive substrate. A conductive transparent electrode is deposited on the backside of the substrate. A variable polarity voltage is applied between the membrane and the back electrode of the device accompanied with high-frequency modulated light. The membrane is deformed when a modulated light illuminates the backside of the device. This occurs due to impedance and bias redistribution between the two cascaded impedances. This operating mechanism of a microelectromechanical systems device is suitable for detecting moving targets.
© 2007 Optical Society of America
OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.4000) Optical devices : Microstructure fabrication
(230.6120) Optical devices : Spatial light modulators
(250.0250) Optoelectronics : Optoelectronics
(330.4150) Vision, color, and visual optics : Motion detection
History
Original Manuscript: July 25, 2006
Revised Manuscript: October 23, 2006
Manuscript Accepted: October 27, 2006
Published: February 20, 2007
Virtual Issues
Vol. 2, Iss. 4 Virtual Journal for Biomedical Optics
Citation
Jed Khoury, Charles L. Woods, Bahareh Haji-saeed, Sandip K. Sengupta, William D. Goodhue, and John Kierstead, "Optically addressed microelectromechanical systems driven with high-frequency modulated light," Appl. Opt. 46, 1194-1200 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-8-1194
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