To systematically investigate the influence of lapping parameters on subsurface damage (SSD) depth and characterize the damage feature comprehensively, maximum depth and distribution of SSD generated in the optical lapping process were measured with the magnetorheological finishing wedge technique. Then, an interaction of adjacent indentations was applied to interpret the generation of maximum depth of SSD. Eventually, the lapping procedure based on the influence of lapping parameters on the material removal rate and SSD depth was proposed to improve the lapping efficiency.
© 2008 Optical Society of America
Instrumentation, Measurement, and Metrology
Original Manuscript: October 16, 2007
Revised Manuscript: January 29, 2008
Manuscript Accepted: January 30, 2008
Published: March 26, 2008
Zhuo Wang, Yulie Wu, Yifan Dai, and Shengyi Li, "Subsurface damage distribution in the lapping process," Appl. Opt. 47, 1417-1426 (2008)