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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 10 — Apr. 1, 2008
  • pp: 1427–1429

High-fidelity replication of Dammann gratings using soft lithography

Wei Wang, Changhe Zhou, and Wei Jia  »View Author Affiliations

Applied Optics, Vol. 47, Issue 10, pp. 1427-1429 (2008)

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We report the experimental results of using the soft lithography method for replication of Dammann gratings. By using an elastomeric stamp, uniform grating structures were transferred to the UV-curable polymer. To evaluate the quality of the replication, diffraction images and light intensity were measured. Compared with the master devices, the replicas of Dammann gratings show a slight deviation in both surface relief profile and optical performance. Experimental results demonstrated that high-fidelity replication of Dammann gratings is realized by using soft lithography with low cost and high throughput.

© 2008 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.2770) Diffraction and gratings : Gratings
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.1950) Optical devices : Diffraction gratings

ToC Category:
Diffraction and Gratings

Original Manuscript: October 9, 2007
Manuscript Accepted: January 31, 2008
Published: March 26, 2008

Wei Wang, Changhe Zhou, and Wei Jia, "High-fidelity replication of Dammann gratings using soft lithography," Appl. Opt. 47, 1427-1429 (2008)

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