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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 10 — Apr. 1, 2008
  • pp: 1430–1433

Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing

Jiubin Tan, Mingguang Shan, Chenguang Zhao, and Jian Liu  »View Author Affiliations

Applied Optics, Vol. 47, Issue 10, pp. 1430-1433 (2008)

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Diffractive microlens arrays with continuous relief are designed, fabricated, and characterized by using Fermat’s principle to create an array of spots on the photoresist-coated surface of a substrate for parallel laser direct writing. Experimental results indicate that a diffraction efficiency of 71.4% and a spot size of 1.97 μm (FWHM) can be achieved at normal incidence and a writing laser wavelength of 441.6 nm with an array of F / 4 fabricated on fused silica, and the developed array can be used to improve the utilization ratio of writing laser energy.

© 2008 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
Diffraction and Gratings

Original Manuscript: September 25, 2007
Manuscript Accepted: January 31, 2008
Published: March 26, 2008

Jiubin Tan, Mingguang Shan, Chenguang Zhao, and Jian Liu, "Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing," Appl. Opt. 47, 1430-1433 (2008)

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