Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing
Applied Optics, Vol. 47, Issue 10, pp. 1430-1433 (2008)
http://dx.doi.org/10.1364/AO.47.001430
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Abstract
Diffractive microlens arrays with continuous relief are designed, fabricated, and characterized by using Fermat’s principle to create an array of spots on the photoresist-coated surface of a substrate for parallel laser direct writing. Experimental results indicate that a diffraction efficiency of 71.4% and a spot size of
© 2008 Optical Society of America
OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication
(050.1965) Diffraction and gratings : Diffractive lenses
ToC Category:
Diffraction and Gratings
History
Original Manuscript: September 25, 2007
Manuscript Accepted: January 31, 2008
Published: March 26, 2008
Citation
Jiubin Tan, Mingguang Shan, Chenguang Zhao, and Jian Liu, "Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing," Appl. Opt. 47, 1430-1433 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-10-1430
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