OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 10 — Apr. 1, 2008
  • pp: B32–B43

Robust, common path, phase shifting interferometer and optical profilometer

Remy Tumbar, Daniel L. Marks, and David J. Brady  »View Author Affiliations


Applied Optics, Vol. 47, Issue 10, pp. B32-B43 (2008)
http://dx.doi.org/10.1364/AO.47.000B32


View Full Text Article

Enhanced HTML    Acrobat PDF (1106 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We describe an improved implementation of our previously reported common-path, phase shifting, and shearing interferometer. Using a time-multiplexed phase shifting scheme, we demonstrate higher sampling resolution, better light sensitivity, and use of arbitrary phase shifting algorithms. We describe microscopic imaging of the surface profile of a copper-plated silicon wafer and demonstrate that the system is vibration insensitive with λ / 100 repeatability. In a more general discussion of our method, we describe the different functional elements and suggest alternative designs and improvements. Possible uses include full-field coherent imaging and high dynamic range wavefront sensing, which we briefly discuss.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.3170) Microscopy : Interference microscopy
(350.5030) Other areas of optics : Phase
(100.3175) Image processing : Interferometric imaging

History
Original Manuscript: August 9, 2007
Revised Manuscript: November 23, 2007
Manuscript Accepted: November 28, 2007
Published: February 8, 2008

Virtual Issues
Vol. 3, Iss. 5 Virtual Journal for Biomedical Optics

Citation
Remy Tumbar, Daniel L. Marks, and David J. Brady, "Robust, common path, phase shifting interferometer and optical profilometer," Appl. Opt. 47, B32-B43 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-10-B32


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. V. Oppenheim and J. S. Lim, "The importance of phase in signals," Proc. IEEE 69, 529 (1981). [CrossRef]
  2. J. Curlander and R. McDonough, Synthetic Aperture Radar, Systems and Signal Processing (Wiley, 1991).
  3. G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, A. Finizio, and S. Grilli, "A digital holographic microscope for complete characterization of microelectromechanical systems," Meas. Sci. Technol. 15, 529-539 (2004). [CrossRef]
  4. T. Colomb, E. Cuche, P. Dahgren, A. M. Marian, F. Montfort, C. D. Depeursinge, P. Marquet, and P. J. Magistretti, "3D imaging of surfaces and cells by numerical reconstruction of wavefronts in digital holography applied to transmission and reflection microscopy," in Proceedings of 2002 IEEE International Symposium on Biomedical Imaging (IEEE, 2002), pp. 773-776.
  5. C. D. Depeursinge, E. Cuche, P. Marquet, T. Colomb, P. Dahlgren, A. M. Marian, F. Montfort, and P. J. Magistretti, "Digital holography applied to microscopy," Proc. SPIE 4659, 30-34 (2002). [CrossRef]
  6. R. Tumbar and D. J. Brady, "Sampling field sensor with anisotropic fan-out," Appl. Opt. 41, 6621-6636 (2002). [CrossRef] [PubMed]
  7. R. Tumbar and D. J. Brady, " Interferometric sensor and method to detect optical fields," U.S. patent 6,639,683 (28 October 2003).
  8. J. E. Greivenkamp and A. E. Lowman, "Modulation transfer function measurement of sparse-array sensors using a self-calibrating fringe pattern," Appl. Opt. 33, 5029-5036 (1994). [CrossRef] [PubMed]
  9. G. Toraldo di Francia, "Resolving power and information," J. Opt. Soc. Am. 45, 497-501 (1955). [CrossRef]
  10. K. Creath, "Phase-measurement interferometry techniques," in Progress in Optics, E.Wolf, ed. (North-Holland, 1988), Vol. 26, pp. 349-393. [CrossRef]
  11. D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software (Wiley, 1998).
  12. D. C. Ghiglia and L. A. Romero, "Robust two-dimensional weighted and unweighted phase unwrapping that uses fast transforms and iterative methods," J. Opt. Soc. Am. A 11, 107-117 (1994). [CrossRef]
  13. K. Itoh, "Analysis of the phase unwrapping algorithm," Appl. Opt. 21, 2470 (1982). [CrossRef] [PubMed]
  14. M. Unser, "Sampling--50 years after Shannon," Proc. IEEE 88, 569-589 (2000). [CrossRef]
  15. Kodak KAI-4021 Image Sensor, Eastman Kodak Company (2006).
  16. DALSA IA-G3 CMOS Area Array Sensor, Dalsa Corp. (2006).
  17. A. Papoulis, Signal Analysis (McGraw-Hill, 1977).
  18. H. E. Bennett and J. M. Bennett, "Polarization," in Handbook of Optics, W.G.Driscoll and W.Vaughan, eds. (McGraw-Hill, 1978).
  19. M. Francon, "Polarization interference microscopes," Appl. Opt. 3, 1033-1036 (1964). [CrossRef]
  20. D. S. Kliger, J. W. Lewis, and C. Einterz Randall, Polarized Light in Optics and Spectroscopy (Academic, 1990).
  21. M. Laikin, Lens Design, 3rd ed. (Marcel Dekker, 2001).
  22. J. D. Barchers, D. L. Fried, and D. J. Link, "Evaluation of the performance of a shearing interferometer in strong scintillation in the absence of additive measurement noise," Appl. Opt. 41, 3674-3684 (2002). [CrossRef] [PubMed]
  23. J. D. Barchers, D. L. Fried, D. J. Link, G. A. Tyler, W. Moretti, T. J. Brennan, and R. Fugate, "The performance of wavefront sensors in strong scintillation," Proc. SPIE 4839, 217-227 (2003). [CrossRef]
  24. D. G. Sandler, L. Cuellar, M. Lefebvre, T. Barrett, R. Arnold, P. Johnson, A. Rego, G. Smith, G. Taylor, and B. Spivey, "Shearing interferometry for laser-guide-star atmospheric correction at large D/r00," J. Opt. Soc. Am. A 11, 858-873 (1994). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited