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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 10 — Apr. 1, 2008
  • pp: B32–B43

Robust, common path, phase shifting interferometer and optical profilometer

Remy Tumbar, Daniel L. Marks, and David J. Brady  »View Author Affiliations

Applied Optics, Vol. 47, Issue 10, pp. B32-B43 (2008)

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We describe an improved implementation of our previously reported common-path, phase shifting, and shearing interferometer. Using a time-multiplexed phase shifting scheme, we demonstrate higher sampling resolution, better light sensitivity, and use of arbitrary phase shifting algorithms. We describe microscopic imaging of the surface profile of a copper-plated silicon wafer and demonstrate that the system is vibration insensitive with λ / 100 repeatability. In a more general discussion of our method, we describe the different functional elements and suggest alternative designs and improvements. Possible uses include full-field coherent imaging and high dynamic range wavefront sensing, which we briefly discuss.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.3170) Microscopy : Interference microscopy
(350.5030) Other areas of optics : Phase
(100.3175) Image processing : Interferometric imaging

Original Manuscript: August 9, 2007
Revised Manuscript: November 23, 2007
Manuscript Accepted: November 28, 2007
Published: February 8, 2008

Virtual Issues
Vol. 3, Iss. 5 Virtual Journal for Biomedical Optics

Remy Tumbar, Daniel L. Marks, and David J. Brady, "Robust, common path, phase shifting interferometer and optical profilometer," Appl. Opt. 47, B32-B43 (2008)

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