OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 11 — Apr. 10, 2008
  • pp: 1846–1850

Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties

V. Zorba, N. Boukos, I. Zergioti, and C. Fotakis  »View Author Affiliations


Applied Optics, Vol. 47, Issue 11, pp. 1846-1850 (2008)
http://dx.doi.org/10.1364/AO.47.001846


View Full Text Article

Enhanced HTML    Acrobat PDF (5234 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The effect of laser pulse duration on the morphology, composition, crystallinity and optical properties of self-organized Si microcones fabricated using 248 nm laser pulses ( 500 fs , 5 ps and 15 ns ) in an SF 6 atmosphere, is presented in this paper. Despite distinct differences in the morphology, the Si cones show similar structure and composition independently of the laser pulse duration used: a core of single- crystalline Si, covered by a few hundred nanometer thick, sulfur-doped nanocrystalline Si layer, where no amorphous Si is present. The obtained features exhibit strong below-bandgap absorptance, making them excellent candidates for Si based photodetectors with improved spectral response.

© 2008 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(160.4760) Materials : Optical properties

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: January 18, 2008
Manuscript Accepted: March 2, 2008
Published: April 7, 2008

Citation
V. Zorba, N. Boukos, I. Zergioti, and C. Fotakis, "Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties," Appl. Opt. 47, 1846-1850 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-11-1846


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. J. Pedraza, J. D. Fowlkes, and D. H. Lowndes, “Silicon microcolumn arrays grown by nanosecond pulsed-excimer-laser irradiation,” Appl. Phys. Lett. 74, 2322-2324 (1999). [CrossRef]
  2. D. H. Lowndes, J. D. Fowlkes, and A. J. Pedraza, “Early stages of pulsed-laser growth of silicon microcolumns and microcones in air and SF6,” Appl. Surf. Sci. 154, 647-658 (2000). [CrossRef]
  3. V. Zorba, P. Tzanetakis, C. Fotakis, E. Spanakis, E. Stratakis, D. G. Papazoglou, and I. Zergioti, “Silicon electron emitters fabricated by ultraviolet laser pulses,” Appl. Phys. Lett. 88, 081103 (2006). [CrossRef]
  4. V. Zorba, I. Alexandrou, I. Zergioti, A. Manousaki, C. Ducati, A. Neumeister, C. Fotakis, and G. A. J. Amaratunga, “Laser microstructuring of Si surfaces for low-threshold field-electron emission,” Thin Solid Films 453-454, 492-495 (2004). [CrossRef]
  5. A. V. Karabutov, V. D. Frolov, E. N. Loubnin, A. V. Simakin, and G. A. Shafeev, “Low-threshold field electron emission of Si micro-tip arrays produced by laser ablation,” Appl. Phys. A 76, 413-416 (2003). [CrossRef]
  6. V. Zorba, L. Persano, D. Pisignano, A. Athanassiou, E. Stratakis, R. Cingolani, P. Tzanetakis, and C. Fotakis, “Making silicon hydrophobic: wettability control by two-lengthscale simultaneous patterning with femtosecond laser irradiation,” Nanotechnology 17, 3234-3238 (2006). [CrossRef]
  7. C. Wu, C. H. Crouch, L. Zhao, J. E. Carey, R. Younkin, J. A. Levinson, E. Mazur, R. M. Farreli, P. Gothoskar, and A. Karger, “Near-unity below-band-gap absorption by microstructured silicon,” Appl. Phys. Lett. 78, 1850-1852 (2001). [CrossRef]
  8. C. H. Crouch, J. E. Carey, J. M. Warrender, M. J. Aziz, E. Mazur, and F. Y. Genin, “Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon,” Appl. Phys. Lett. 84, 1850-1852 (2004). [CrossRef]
  9. C. H. Crouch, J. E. Carey, M. Y. Shen, E. Mazur, and F. Y. Genin, “Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation,” Appl. Phys. A 79, 1635-1641 (2004). [CrossRef]
  10. D. Mills and K. W. Kolasinski, “Solidification driven extrusion of spikes during laser melting of silicon pillars,” Nanotechnology 17, 2741-2744 (2006). [CrossRef]
  11. R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope (Plenum Press, 1996).
  12. W. M. Skiff, R. W. Carpenter, and S. H. Lin, “Near-edge fine-structure analysis of core-shell electronic absorption edges in silicon and its refractory compounds with the use of electron-energy-loss microspectroscopy,” J. Appl. Phys. 62, 2439-2449(1987). [CrossRef]
  13. M. Worchl, H. J. Engelmann, W. Blum, and E. Zschech, “Cross-sectional thin film characterization of Si compounds in semiconductor device structures using both elemental and ELNES mapping by EFTEM,” Thin Solid Films 405, 198-204 (2002). [CrossRef]
  14. G. A. Botton and M. W. Phaneuf, “Imaging, spectroscopy and spectroscopic imaging with an energy filtered field emission TEM,” Micron 30, 109-119 (1999). [CrossRef]
  15. G. Duscher, R. Buczko, S. J. Pennycook, and S. T. Pantelides, “Core-hole effects on energy-loss near-edge structure,” Ultramicroscopy 86, 355-362 (2001). [CrossRef] [PubMed]
  16. K. Hayakawa, T. Fujikawa, and S. Muto, “Experimental and full multiple scattering approaches to energy-loss near-edge structures for c-Si, a-Si and a-Si:H,” Chem. Phys. Lett. 371, 498-503 (2003). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited