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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 11 — Apr. 10, 2008
  • pp: 1846–1850

Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties

V. Zorba, N. Boukos, I. Zergioti, and C. Fotakis  »View Author Affiliations

Applied Optics, Vol. 47, Issue 11, pp. 1846-1850 (2008)

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The effect of laser pulse duration on the morphology, composition, crystallinity and optical properties of self-organized Si microcones fabricated using 248 nm laser pulses ( 500 fs , 5 ps and 15 ns ) in an SF 6 atmosphere, is presented in this paper. Despite distinct differences in the morphology, the Si cones show similar structure and composition independently of the laser pulse duration used: a core of single- crystalline Si, covered by a few hundred nanometer thick, sulfur-doped nanocrystalline Si layer, where no amorphous Si is present. The obtained features exhibit strong below-bandgap absorptance, making them excellent candidates for Si based photodetectors with improved spectral response.

© 2008 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(160.4760) Materials : Optical properties

ToC Category:
Lasers and Laser Optics

Original Manuscript: January 18, 2008
Manuscript Accepted: March 2, 2008
Published: April 7, 2008

V. Zorba, N. Boukos, I. Zergioti, and C. Fotakis, "Ultraviolet femtosecond, picosecond and nanosecond laser microstructuring of silicon: structural and optical properties," Appl. Opt. 47, 1846-1850 (2008)

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