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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 12 — Apr. 20, 2008
  • pp: 2082–2090

Optimal implementation of a microspectrometer based on a single flat diffraction grating

Semen Grabarnik, Arvin Emadi, Elena Sokolova, Gleb Vdovin, and Reinoud F. Wolffenbuttel  »View Author Affiliations

Applied Optics, Vol. 47, Issue 12, pp. 2082-2090 (2008)

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An analytical model has been developed and applied to explore the limits in the design of a highly miniaturized planar optical microspectrometer based on an imaging diffraction grating. This design tool has been validated as providing the smallest possible dimensions while maintaining acceptable spectral resolution. The resulting planar spectrometer is composed of two parallel glass plates, which contain all components of the device, including a reflective slit and an imaging diffraction grating. Fabrication is based on microelectromechanical system technology and starts with a single glass wafer; IC-compatible deposition and lithography are applied to realize the parts in aluminum, which makes the microspectrometer highly tolerant for component mismatch. The fabricated spectrometer was mounted directly on top of an image sensor and takes up a volume of only 50 mm 3 . The measured spectral resolution of 6 nm (FWHM) in the 100 nm operating wavelength range ( 600 700 nm ) is in agreement with a model calculation.

© 2008 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(220.2740) Optical design and fabrication : Geometric optical design
(230.3990) Optical devices : Micro-optical devices
(300.6190) Spectroscopy : Spectrometers

ToC Category:

Original Manuscript: December 19, 2007
Revised Manuscript: March 18, 2008
Manuscript Accepted: March 21, 2008
Published: April 16, 2008

Semen Grabarnik, Arvin Emadi, Elena Sokolova, Gleb Vdovin, and Reinoud F. Wolffenbuttel, "Optimal implementation of a microspectrometer based on a single flat diffraction grating," Appl. Opt. 47, 2082-2090 (2008)

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