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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 13 — May. 1, 2008
  • pp: C114–C123

Chalcogenide coatings of Ge15Sb20S65 and Te20As30Se50

Virginie Nazabal, Michel Cathelinaud, Weidong Shen, Petr Nemec, Frédéric Charpentier, Hervé Lhermite, Marie-Laure Anne, Jérémie Capoulade, Fabien Grasset, Alain Moreac, Satoru Inoue, Miloslav Frumar, Jean-Luc Adam, Michel Lequime, and Claude Amra  »View Author Affiliations

Applied Optics, Vol. 47, Issue 13, pp. C114-C123 (2008)

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Chalcogenide coatings are investigated to obtain either optical components for spectral applications or optochemical sensors in the mid-infrared. The deposition of G e 15 S b 20 S 65 and T e 20 A s 30 S e 50 chalcogenide glasses is performed by two physical techniques: electron-beam and pulsed-laser deposition. The quality of the film is analyzed by scanning electron microscopy, atomic force microscopy, and energy dispersive spectroscopy to characterize the morphology, topography, and chemical composition. The optical properties and optical constants are also determined. A C F 4 dry etching is performed on these films to obtain a channeled optical waveguide. For a passband filter made by electron-beam deposition, cryolite as a low-refractive-index material and chalcogenide glasses as high-refractive-index materials are used to favor a large refractive-index contrast. A shift of a centered wavelength of a photosensitive passband filter is controlled by illumination time.

© 2008 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(160.4670) Materials : Optical materials
(160.4760) Materials : Optical properties
(310.0310) Thin films : Thin films
(310.3840) Thin films : Materials and process characterization

Original Manuscript: August 2, 2007
Manuscript Accepted: September 17, 2007
Published: November 29, 2007

Virginie Nazabal, Michel Cathelinaud, Weidong Shen, Petr Nemec, Frédéric Charpentier, Hervé Lhermite, Marie-Laure Anne, Jérémie Capoulade, Fabien Grasset, Alain Moreac, Satoru Inoue, Miloslav Frumar, Jean-Luc Adam, Michel Lequime, and Claude Amra, "Chalcogenide coatings of Ge15Sb20S65 and Te20As30Se50," Appl. Opt. 47, C114-C123 (2008)

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