Ion- and plasma-assisted deposition has been extensively used for the fabrication of high-performance optical films with dense and smooth microstructures that are essential for applications such as low-loss and environmentally stable optics.
© 2008 Optical Society of America
Original Manuscript: July 23, 2007
Revised Manuscript: October 17, 2007
Manuscript Accepted: October 19, 2007
Published: November 30, 2007
Jue Wang, Robert L. Maier, and Horst Schreiber, "Elastic and plastic relaxation of densified SiO2 films," Appl. Opt. 47, C131-C134 (2008)