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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 13 — May. 1, 2008
  • pp: C266–C270

Residual stress in obliquely deposited MgF2 thin films

Cheng-Chung Jaing, Ming-Chung Liu, Cheng-Chung Lee, Wen-Hao Cho, Wei-Ting Shen, Chien-Jen Tang, and Bo-Huei Liao  »View Author Affiliations

Applied Optics, Vol. 47, Issue 13, pp. C266-C270 (2008)

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M g F 2 films with a columnar microstructure are obliquely deposited on glass substrates by resistive heating evaporation. The columnar angles of the films increases with the deposition angle. Anisotropic stress does not develop in the films with tilted columns. The residual stresses in the films depend on the deposition and columnar angles in a columnar microstructure.

© 2008 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6870) Thin films : Thin films, other properties
(310.4925) Thin films : Other properties (stress, chemical, etc.)

Original Manuscript: July 31, 2007
Revised Manuscript: December 23, 2007
Manuscript Accepted: December 26, 2007
Published: February 13, 2008

Cheng-Chung Jaing, Ming-Chung Liu, Cheng-Chung Lee, Wen-Hao Cho, Wei-Ting Shen, Chien-Jen Tang, and Bo-Huei Liao, "Residual stress in obliquely deposited MgF2 thin films," Appl. Opt. 47, C266-C270 (2008)

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