Residual stress in obliquely deposited MgF2 thin films
Applied Optics, Vol. 47, Issue 13, pp. C266-C270 (2008)
http://dx.doi.org/10.1364/AO.47.00C266
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Abstract
© 2008 Optical Society of America
OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6870) Thin films : Thin films, other properties
(310.4925) Thin films : Other properties (stress, chemical, etc.)
History
Original Manuscript: July 31, 2007
Revised Manuscript: December 23, 2007
Manuscript Accepted: December 26, 2007
Published: February 13, 2008
Citation
Cheng-Chung Jaing, Ming-Chung Liu, Cheng-Chung Lee, Wen-Hao Cho, Wei-Ting Shen, Chien-Jen Tang, and Bo-Huei Liao, "Residual stress in obliquely deposited MgF2 thin films," Appl. Opt. 47, C266-C270 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-13-C266
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