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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 13 — May. 1, 2008
  • pp: C279–C283

Efficiency of polarimetric z probing in optical multilayers

Claude Amra, Carole Deumié, Gaelle Georges, Catherine Grèzes-Besset, and Frédéric Chazallet  »View Author Affiliations


Applied Optics, Vol. 47, Issue 13, pp. C279-C283 (2008)
http://dx.doi.org/10.1364/AO.47.00C279


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Abstract

Numerical calculation is performed to validate the principles of a single optical technique devoted to real time probing or imaging of submultilayers within interferential coatings.

© 2008 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(310.1620) Thin films : Interference coatings
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: July 26, 2007
Revised Manuscript: December 10, 2007
Manuscript Accepted: December 11, 2007
Published: February 20, 2008

Citation
Claude Amra, Carole Deumié, Gaelle Georges, Catherine Grèzes-Besset, and Frédéric Chazallet, "Efficiency of polarimetric z probing in optical multilayers," Appl. Opt. 47, C279-C283 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-13-C279


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References

  1. F. J. Van Milligen, B. Bovard, M. R. Jacobson, J. Mueller, R. Potoff, R. L. Shoemaker, and H. A. Macleod, “Development of an automated scanning monochromator for monitoring thin films,” Appl. Opt. 24, 1799-1802 (1985). [CrossRef] [PubMed]
  2. B. Bovard, F. J. Van Milligen, M. J. Messerly, S. G. Saxe, and H. A. Macleod, “Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements,” Appl. Opt. 24, 1803-1807 (1985). [CrossRef] [PubMed]
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  6. C. Amra and C. Deumié, “Z-probing of optical multilayers: theory,” Opt. Lett. 31, 2704-2706 (2006). [CrossRef] [PubMed]
  7. D. Ausserré and M. P. Valignat, “Wide-field optical imaging of surface nanostructures,” Nano. Lett. 6, 1384-1388 (2006). [CrossRef] [PubMed]
  8. C. Amra, C. Deumié, and O. Gilbert, “Elimination of polarized light scattered by surface roughness or bulk heterogeneity,”Opt. Exp. 13, 10854-10864 (2005). [CrossRef]
  9. G. Georges, C. Deumié, and C. Amra, “Selective probing and imaging in random media based on the elimination of polarized scattering,” Opt. Exp. 15, 9804-9816 (2007). [CrossRef]

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