OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 13 — May. 1, 2008
  • pp: C303–C309

High-accuracy measurements of the normal specular reflectance

Philippe Voarino, Hervé Piombini, Frédéric Sabary, Daniel Marteau, Jimmy Dubard, Jacques Hameury, and Jean Remy Filtz  »View Author Affiliations


Applied Optics, Vol. 47, Issue 13, pp. C303-C309 (2008)
http://dx.doi.org/10.1364/AO.47.00C303


View Full Text Article

Enhanced HTML    Acrobat PDF (3783 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The French Laser Megajoule (LMJ) is designed and constructed by the French Commissariat à l'Energie Atomique (CEA). Its amplifying section needs highly reflective multilayer mirrors for the flash lamps. To monitor and improve the coating process, the reflectors have to be characterized to high accuracy. The described spectrophotometer is designed to measure normal specular reflectance with high repeatability by using a small spot size of 100 μm. Results are compared with ellipsometric measurements. The instrument can also perform spatial characterization to detect coating nonuniformity.

© 2008 Optical Society of America

OCIS Codes
(120.1840) Instrumentation, measurement, and metrology : Densitometers, reflectometers
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5700) Instrumentation, measurement, and metrology : Reflection

History
Original Manuscript: July 30, 2007
Revised Manuscript: November 13, 2007
Manuscript Accepted: January 7, 2008
Published: February 26, 2008

Citation
Philippe Voarino, Hervé Piombini, Frédéric Sabary, Daniel Marteau, Jimmy Dubard, Jacques Hameury, and Jean Remy Filtz, "High-accuracy measurements of the normal specular reflectance," Appl. Opt. 47, C303-C309 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-13-C303


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. M. L. André, “The French Megajoule Laser Project (LMJ),” Fusion Eng. Des. 44, 43-49 (1999). [CrossRef]
  2. E. I. Moses, “The National Ignition Facility high-energy ultraviolet laser system,” Opt. Mater. 26, 515-521 (2004). [CrossRef]
  3. F. Sabary, D. Marteau, P. Hamel, and H. Piombini, “High reflectivity protected silver coatings on stainless steel and aluminium substrates,” presented at the Society of Vacuum Coaters 47th Annual Technical Conference, Dallas, Texas (April 2004).
  4. H. H. Cary, “Double folded-ζ-configuration monochromator,” U.S. patent 3,098,408 (23 July 1963).
  5. J. Strong, Procedures in Experimental Physics (Prentice-Hall, 1938), p. 376.
  6. H. E. Bennett and W. F. Koehler, “Precision measurement of absolute specular reflectance with minimized systematic errors,” J. Opt. Soc. Am. 50, 1-5 (1960). [CrossRef]
  7. K. D. Mielenz, K. L. Eckerle, R. P. Madden, and J. Reader, “New reference spectrophotometer,” Appl. Opt. 12, 1630-1641 (1973). [CrossRef] [PubMed]
  8. J. C. Zwinkels and D. S. Gignac, “Design and testing of a new high-accuracy ultraviolet-visible-near-infrared spectrophotometer,” Appl. Opt. 31, 1557-1567 (1992). [CrossRef] [PubMed]
  9. D. Allen and M. Nadal, “Facilities,” http://physics.nist.gov/Divisions/Div844/facilities/specphoto/facilities.html.
  10. P. Y. Barnes, E. A. Early, and A. C. Parr, “NIST measurement services: spectral reflectance,” Optical Technology Division, National Institute of Standards and Technology Publication 250-48, (March 1998).
  11. J. E. Proctor and P. Y. Barnes, “NIST high accuracy reference reflectometer-spectrophotometer,”J. Res. Natl. Inst. Stand. Technol. 101, 619-627 (1996).
  12. D. Enard and H. Visser, “Universal spectrophotometer for determining the efficiency of optical-components and systems,” Appl. Opt. 21, 4459-4464 (1982). [CrossRef] [PubMed]
  13. A. E. Norton, C. L. Mallory, H. V. Pham, and P. Rasmussen, “Broadband microspectroreflectometer,” U.S. patent 5,747,813 (5 May 1998).
  14. P. G. Borden, J. Li, and J. Madsen, “Calibration as well as measurement on the same workpiece during fabrication,” U.S. patent 6,940,592 (6 September 2005).
  15. P. Voarino, S. Petitrenaud, H. Piombini, F. Sabary, and D. Marteau, “High-precision measurements of reflectance,” Proc. SPIE 6342, 63421Z (2006). [CrossRef]
  16. S. Petitenaud, P. Voarino, H. Piombini, F. Sabary, and D. Marteau, “High-precision measurements of the LMJ's reflectors,” presented at the Optical Fabrication and Testing Conference, Rochester, New York, 9-11 October 2006.
  17. P. Voarino, S. Petitrenaud, H. Piombini, F. Sabary, and D. Marteau, “Spectrophotometer for high-precision measurements of heterogeneities,” presented at the EOS Annual Meeting 2006, Paris, France, 16-19 October 2006.
  18. H. Piombini and P. Voarino, “Dispositif et procédé de mesure de caractérisation par réflectométrie,” French patent 0651951 (30 May 2006).
  19. H. Piombini and P. Voarino, “Apparatus designed for very accurate measurement of optical reflections,” Appl. Opt. 46, 8609-8618 (2007). [CrossRef] [PubMed]
  20. E. D. Palik, Handbook of Optical Constants (Academic, 1985).
  21. F. Abelès, “Methods for determining optical parameters of thin films,”Ann. Phys. 5, 596, 706 (1950).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited