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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 13 — May. 1, 2008
  • pp: C303–C309

High-accuracy measurements of the normal specular reflectance

Philippe Voarino, Hervé Piombini, Frédéric Sabary, Daniel Marteau, Jimmy Dubard, Jacques Hameury, and Jean Remy Filtz  »View Author Affiliations

Applied Optics, Vol. 47, Issue 13, pp. C303-C309 (2008)

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The French Laser Megajoule (LMJ) is designed and constructed by the French Commissariat à l'Energie Atomique (CEA). Its amplifying section needs highly reflective multilayer mirrors for the flash lamps. To monitor and improve the coating process, the reflectors have to be characterized to high accuracy. The described spectrophotometer is designed to measure normal specular reflectance with high repeatability by using a small spot size of 100 μm. Results are compared with ellipsometric measurements. The instrument can also perform spatial characterization to detect coating nonuniformity.

© 2008 Optical Society of America

OCIS Codes
(120.1840) Instrumentation, measurement, and metrology : Densitometers, reflectometers
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5700) Instrumentation, measurement, and metrology : Reflection

Original Manuscript: July 30, 2007
Revised Manuscript: November 13, 2007
Manuscript Accepted: January 7, 2008
Published: February 26, 2008

Philippe Voarino, Hervé Piombini, Frédéric Sabary, Daniel Marteau, Jimmy Dubard, Jacques Hameury, and Jean Remy Filtz, "High-accuracy measurements of the normal specular reflectance," Appl. Opt. 47, C303-C309 (2008)

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