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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 13 — May. 1, 2008
  • pp: C315–C318

Measurement of stress in aluminum film coated on a flexible substrate by the shadow moiré method

Kuan-Shiang Lee, Chien-Jen Tang, Hsi-Chao Chen, and Cheng-Chung Lee  »View Author Affiliations


Applied Optics, Vol. 47, Issue 13, pp. C315-C318 (2008)
http://dx.doi.org/10.1364/AO.47.00C315


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Abstract

This investigation proposes the use of the shadow moiré method (SMM) to measure stress in a thin film that is coated on a flexible substrate. The technique defines the profile of the sample by contour lines without the application of an external force, and the radius of curvature is calculated from these contour lines. The SMM is insensitive to environmental noise and has the same advantages as the interference method, such as being nondestructive and easy to use. For Al film with a thickness of 120 n m coated on a polyimide substrate by a DC magnetron sputtering system (800 W, room temperature), the stress is 0.45 ± 0.042 G P a .

© 2008 Optical Society of America

OCIS Codes
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(310.6870) Thin films : Thin films, other properties

ToC Category:
Thin Films

History
Original Manuscript: July 31, 2007
Revised Manuscript: January 28, 2008
Manuscript Accepted: January 31, 2008
Published: March 11, 2008

Citation
Kuan-Shiang Lee, Chien-Jen Tang, Hsi-Chao Chen, and Cheng-Chung Lee, "Measurement of stress in aluminum film coated on a flexible substrate by the shadow moiré method," Appl. Opt. 47, C315-C318 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-13-C315

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