OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 13 — May. 1, 2008
  • pp: C315–C318

Measurement of stress in aluminum film coated on a flexible substrate by the shadow moiré method

Kuan-Shiang Lee, Chien-Jen Tang, Hsi-Chao Chen, and Cheng-Chung Lee  »View Author Affiliations

Applied Optics, Vol. 47, Issue 13, pp. C315-C318 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (523 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



This investigation proposes the use of the shadow moiré method (SMM) to measure stress in a thin film that is coated on a flexible substrate. The technique defines the profile of the sample by contour lines without the application of an external force, and the radius of curvature is calculated from these contour lines. The SMM is insensitive to environmental noise and has the same advantages as the interference method, such as being nondestructive and easy to use. For Al film with a thickness of 120 n m coated on a polyimide substrate by a DC magnetron sputtering system (800 W, room temperature), the stress is 0.45 ± 0.042 G P a .

© 2008 Optical Society of America

OCIS Codes
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(310.6870) Thin films : Thin films, other properties

ToC Category:
Thin Films

Original Manuscript: July 31, 2007
Revised Manuscript: January 28, 2008
Manuscript Accepted: January 31, 2008
Published: March 11, 2008

Kuan-Shiang Lee, Chien-Jen Tang, Hsi-Chao Chen, and Cheng-Chung Lee, "Measurement of stress in aluminum film coated on a flexible substrate by the shadow moiré method," Appl. Opt. 47, C315-C318 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. Z. Suo, E. Y. Ma, H. Gleskova, and S. Wagner, “Mechanics of rollable and foldable film-on-foil electronics,” Appl. Phys. Lett. 74, 1177-1179 (1999). [CrossRef]
  2. H. Gleskova, I-Chun Cheng, S. Wagner, and Z. Suo, “Thermomechanical criteria for overlay alignment in flexible thin film electronic circuits,” Appl. Phys. Lett. 88, 011905 (2006). [CrossRef]
  3. P. I. Hsu, H. Gleskova, M. Huang, Z. Suo, S. Wagner, and J. C. Sturm, “Amorphous Si TFTs on plastically deformed spherical domes,” J. Non-Cryst. Solids 299-302, 1355-1359 (2002). [CrossRef]
  4. I.-C. Cheng, A. Kattamis, K. Long, J. C. Sturm, and S. Wagner, “Stress control for overlay registration in a-Si:H TFTs on flexible organic-polymer-foil substrates,” J. Soc. Inf. Disp. 563-568 (2005). [CrossRef]
  5. G. P. Crawford, “Mechanic of TFT technology on flexible substrates,” in Flexible Flat Panel Displays (Wiley, 2005), pp. 1-20. [CrossRef]
  6. S. H. Won, J. K. Chung, C. B. Lee, H. C. Nam, J. H. Hur, and J. Jang, “Effect of mechanical and electrical stresses on the performance of an a-Si:H TFT on plastic substrate,” J. Electrochem. Soc. 151, G167-G170 (2004). [CrossRef]
  7. L. Pereira, D. Brida, E. Fortunato, I. Ferreira, H. Águas, V. Silva, M. F. M. Costa, V. Teixeira, and R. Martins, “a-Si:H interface optimisation for thin film position sensitive detectors produced on polymeric substrates,” J. Non-Cryst. Solids 299-302, 1289-1294 (2002). [CrossRef]
  8. H. Takasaki, “Moire topography,” Appl. Opt. 9, 1467-1472 (1970). [CrossRef] [PubMed]
  9. L. B. Freund and S. Suresh, “Film stress and substrate curvature,” in Thin Film Materials: Stress, Defect Formation and Surface Evolution (Cambridge U. Press, 2003), pp. 86-153.
  10. K. Suzuki and I. Shimoyama, “Insect-model based microrobot with elastic hinges,” J. Microelectromech. Syst. 3, 4-9 (1994). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited