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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 13 — May. 1, 2008
  • pp: C49–C54

In situ optical characterization and reengineering of interference coatings

Steffen Wilbrandt, Olaf Stenzel, Norbert Kaiser, Michael K. Trubetskov, and Alexander V. Tikhonravov  »View Author Affiliations


Applied Optics, Vol. 47, Issue 13, pp. C49-C54 (2008)
http://dx.doi.org/10.1364/AO.47.000C49


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Abstract

A new optical monitoring system has been developed that allows recording of transmission spectra in the wavelength range between 400 and 920 ‚ÄČ nm of a growing optical coating during deposition. Several kinds of thin film sample have been prepared by use of a hybrid monitoring strategy that is essentially based on a combination of quartz monitoring and in situ transmission spectra measurements. We demonstrate and discuss the applicability of our system for reengineering procedures of high-low stacks and measurements of small vacuum or thermal shifts of optical coatings.

© 2008 Optical Society of America

OCIS Codes
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: August 2, 2007
Manuscript Accepted: September 12, 2007
Published: November 14, 2007

Citation
Steffen Wilbrandt, Olaf Stenzel, Norbert Kaiser, Michael K. Trubetskov, and Alexander V. Tikhonravov, "In situ optical characterization and reengineering of interference coatings," Appl. Opt. 47, C49-C54 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-13-C49

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