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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 16 — Jun. 1, 2008
  • pp: 2926–2930

Electron-beam deposited boron coatings for the extreme ultraviolet

Manuela Vidal-Dasilva, Mónica Fernández-Perea, José A. Méndez, José A. Aznárez, and Juan I. Larruquert  »View Author Affiliations


Applied Optics, Vol. 47, Issue 16, pp. 2926-2930 (2008)
http://dx.doi.org/10.1364/AO.47.002926


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Abstract

Boron films deposited by evaporation with an electron-beam were found to have a relatively high reflectance in the extreme ultraviolet with values similar to those of ion-beam-sputtered (IBS) SiC and IBS B 4 C . The largest reflectance was measured for an 11 nm thick boron film. Some reflectance degradation was observed for boron films stored in a desiccator. Reflectance degradation varied from sample to sample and was found to be either similar to that of IBS SiC and IBS B 4 C or larger.

© 2008 Optical Society of America

OCIS Codes
(230.4040) Optical devices : Mirrors
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme
(260.7210) Physical optics : Ultraviolet, vacuum
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Physical Optics

History
Original Manuscript: November 12, 2007
Revised Manuscript: February 25, 2008
Manuscript Accepted: March 25, 2008
Published: May 21, 2008

Citation
Manuela Vidal-Dasilva, Mónica Fernández-Perea, José A. Méndez, José A. Aznárez, and Juan I. Larruquert, "Electron-beam deposited boron coatings for the extreme ultraviolet," Appl. Opt. 47, 2926-2930 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-16-2926

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