OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 16 — Jun. 1, 2008
  • pp: 2926–2930

Optics InfoBase > Applied Optics > Volume 47 > Issue 16 > Page 2926

Electron-beam deposited boron coatings for the extreme ultraviolet

Manuela Vidal-Dasilva, Mónica Fernández-Perea, José A. Méndez, José A. Aznárez, and Juan I. Larruquert  »View Author Affiliations


Applied Optics, Vol. 47, Issue 16, pp. 2926-2930 (2008)
http://dx.doi.org/10.1364/AO.47.002926


View Full Text Article

Enhanced HTML    Acrobat PDF (488 KB)


Advanced Search

Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Boron films deposited by evaporation with an electron-beam were found to have a relatively high reflectance in the extreme ultraviolet with values similar to those of ion-beam-sputtered (IBS) SiC and IBS B 4 C . The largest reflectance was measured for an 11   nm thick boron film. Some reflectance degradation was observed for boron films stored in a desiccator. Reflectance degradation varied from sample to sample and was found to be either similar to that of IBS SiC and IBS B 4 C or larger.

© 2008 Optical Society of America

OCIS Codes
(230.4040) Optical devices : Mirrors
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme
(260.7210) Physical optics : Ultraviolet, vacuum
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Physical Optics

History
Original Manuscript: November 12, 2007
Revised Manuscript: February 25, 2008
Manuscript Accepted: March 25, 2008
Published: May 21, 2008

Citation
Manuela Vidal-Dasilva, Mónica Fernández-Perea, José A. Méndez, José A. Aznárez, and Juan I. Larruquert, "Electron-beam deposited boron coatings for the extreme ultraviolet," Appl. Opt. 47, 2926-2930 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-16-2926

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited