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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 16 — Jun. 1, 2008
  • pp: 2950–2955

Sapphire-GaN-based planar integrated free-space optical system

M. Hofmann, S. Hauguth-Frank, V. Lebedev, O. Ambacher, and S. Sinzinger  »View Author Affiliations

Applied Optics, Vol. 47, Issue 16, pp. 2950-2955 (2008)

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We report on the design and fabrication of a planar integrated free-space optical system working on the basis of binary phase diffractive optical elements (DOEs) realized in GaN on a sapphire substrate. Group III-nitride/sapphire substrates enable the parallel monolithic integration of passive microoptical elements like lenses and gratings as demonstrated here and optoelectronic devices like light emitters and photodetectors on a single wafer. We present an approach for the simultaneous optimization of the efficiency of transmissive and reflective diffractive optical elements processed in a single lithographic etching step.

© 2008 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
(310.1860) Thin films : Deposition and fabrication
(130.3990) Integrated optics : Micro-optical devices

ToC Category:
Diffraction and Gratings

Original Manuscript: January 9, 2008
Revised Manuscript: April 2, 2008
Manuscript Accepted: April 29, 2008
Published: May 21, 2008

M. Hofmann, S. Hauguth-Frank, V. Lebedev, O. Ambacher, and S. Sinzinger, "Sapphire-GaN-based planar integrated free-space optical system," Appl. Opt. 47, 2950-2955 (2008)

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